A cathodic protection device for a stretchable and shrinkable vacuum coating machine

Abstract

The invention relates to a cathodic protection device for an expandable and shrinkable vacuum coating machine, which belongs to the technical field of vacuum coating equipment manufacturing. The device includes a swing cylinder, a magnetic fluid, a protective baffle, a rotating shaft and a rotating track; the protective baffle is a sliced ​​baffle, including a fixed baffle and a rotating baffle; the fixed baffle includes a left The fixed baffle and the right fixed baffle; the rotating baffle includes a left rotating baffle and a right rotating baffle; the rotating shaft includes a left rotating shaft and a right rotating shaft; Realize the stretching of the cathodic protection baffle in the coating chamber and completely protect the surface of the target material. The baffle interference problem when the cathodes work at the same time.

Description

technical field [0001] The invention relates to a cathodic protection device for an expandable and shrinkable vacuum coating machine, which belongs to the technical field of vacuum coating equipment manufacturing. Background technique [0002] With the development of vacuum coating technology, various new film systems such as multi-component composite coatings and multi-layer composite coatings have emerged. Therefore, coating equipment is required to have multiple sets of cathodes, which can work simultaneously, and multiple sets of cathodes can work simultaneously. The coating production efficiency in industrial production can be improved. [0003] At present, the mainstream coating equipment used in large-scale industrial production, such as Hauzer coating equipment in the Netherlands, wherein the baffle is designed as an open-close type baffle, and the open-close type baffle is used in various cathodes (comprising magnetron sputtering cathode, magnetron sputtering cathod...

AI Technical Summary

Problems solved by technology

[0003] At present, the mainstream coating equipment used in large-scale industrial production, such as Hauzer coating equipment in the Netherlands, wherein the baffle is designed as an open-close type baffle, and the open-close type baffle is used in various cathodes (comprising magnetron sputtering cathode, magnetron sputtering cathode, etc.) Arc cathode and ion source) occupy a large space when the layout space is tight; and when the coating cathode is working, there is interference between adjacent target positions in the open and close baffle, which is difficult to achieve in the case of multiple target positions in the equipment. Simultaneous work of adjacent targets limits the realization of some complex multi-component coatings, resulting in waste of equipment resources and low production efficiency

In addition, there are domestic coating equipment that use single-fan protective baffles. The problem with this type of baffle is that it cannot cover the target surface well, which will cause serious pollution to the target surface.

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