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Rear split pupil laser differential confocal focal length measurement method and device

A technology of differential confocal and measurement methods, which is applied in the direction of measuring devices, optical instrument testing, and testing optical performance, etc., can solve the problem of unsatisfactory high-precision testing of lens vertex focal length and focal length, so as to improve measurement accuracy and reduce measurement errors , the effect of high measurement accuracy

Active Publication Date: 2020-06-05
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

[0009] The purpose of the present invention is to solve the problem of unsatisfactory high-precision testing of lens vertex focal length and focal length, and to provide a method and device for measuring the rear split pupil laser differential confocal focal length. The method collects the measuring beam through the rear pupil, and uses The split-pupil differential confocal detection system detects, and then realizes precise focusing and high-precision measurement of the top focal length and focal length of the lens

Method used

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  • Rear split pupil laser differential confocal focal length measurement method and device
  • Rear split pupil laser differential confocal focal length measurement method and device
  • Rear split pupil laser differential confocal focal length measurement method and device

Examples

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Embodiment 1

[0043] like image 3 As shown, the rear split pupil laser differential confocal focal length measurement method and device include a laser 22, an optical fiber 23, and a point light source 1, which are sequentially placed in the beam splitter 2, collimator lens 4 and The measured lens 5 also includes a D-shaped rear pupil 7 placed in the reflection direction of the beam splitter 2 and a split pupil differential confocal detection system 11 composed of a microscope objective lens 20 and a CCD 21; a main control computer 24 and a motor drive The system 25 is connected so that it drives the plane mirror 6 to scan along the optical axis on the linear guide rail 26 .

[0044] When using the device to measure the focal length of the lens, use the split-pupil differential confocal measurement system 11 in the system to perform high-precision positioning on the surface vertex and focus of the measured lens 5, and then measure its vertex focal length, and calculate The focal length of...

Embodiment 2

[0054] like Figure 4 As shown, the rear split pupil laser differential confocal focal length measurement method and device, which are the same as image 3 The difference of the rear split-pupil differential confocal focal length measuring device in the embodiment is that the rear pupil is replaced by a D-shaped rear pupil 7 with a circular rear pupil 30 .

[0055] The measurement steps of the device are the same as in Example 1.

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Abstract

The invention relates to a post splitting pupil laser differential confocal length measurement method and device, which belong to the technical field of optical precision measurement. In the method, the post pupil is used to block half of measurement beams, a splitting pupil differential confocal detection system is used to detect the measurement beams, a differential confocal response curve is obtained, the absolute zero point of the differential confocal response curve is used to perform precise focusing on the surface vertex position and the focus position of a measured lens, the top focallength of the measured lens is obtained, and the focal length of the measured lens is further calculated. The post splitting pupil laser differential confocal technology is firstly applied to high precision detection on the focal length of the lens, differential confocal focusing and focal length measurement can be realized by only one path of detector, possible falling of the focusing precision caused by change of the measured lens can be avoided, and the measurement precision is improved; and data near the zero point of the differential confocal response curve are subjected to linear fitting, quick focusing triggering and quick measurement triggering can be realized, and the measurement speed, the measurement precision and the anti-scattering ability are greatly enhanced.

Description

technical field [0001] The invention relates to a method and a device for measuring the focal length of a post-divided pupil laser differential confocal, which can be used for non-contact high-precision measurement of the focal length of a lens, and belongs to the technical field of optical precision measurement. Background technique [0002] Focal length measurement has always been an important topic in lens parameter measurement. The focal length is one of the most important parameters among the many parameters of the lens. For lens design, it is nothing more than adjusting various parameters to ensure that the focal length of the lens meets the design requirements and the imaging performance meets the system requirements. Lens focal length measurement usually includes vertex focal length measurement and focal length measurement. In the process of system design and adjustment, these two parameters are usually inseparable, so it is required to measure the vertex focal lengt...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M11/02
CPCG01M11/02G01M11/0207
Inventor 赵维谦杨帅邱丽荣
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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