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Method for analyzing standard test data format (STDF) detection data in real time

A technology for real-time analysis and detection of data, which is applied in the direction of single semiconductor device testing, file access structure, file system, etc. It can solve the problems of lagging analysis methods, inability to analyze in real time, and whether the calibration is accurate and cannot be verified in time, so as to reduce the problem of testing Effect

Active Publication Date: 2019-04-12
SHANGHAI GLORYSOFT CO LTD
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Problems solved by technology

The existing system imports the STDF file into the system for analysis after the wafer test is completed. Real-time analysis cannot be performed during the wafer testing process, resulting in the inability to verify whether the calibration is accurate or not

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  • Method for analyzing standard test data format (STDF) detection data in real time
  • Method for analyzing standard test data format (STDF) detection data in real time
  • Method for analyzing standard test data format (STDF) detection data in real time

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Embodiment Construction

[0046] The specific implementation manners of the present invention will be described below in conjunction with the accompanying drawings.

[0047] Such as figure 1 As shown, the entire real-time analysis system consists of four parts, real-time STDF data disassembly and transmission, real-time STDF data merge analysis, real-time analysis and statistics, exception handling rule management. Real-time STDF data disassembly transmission:

[0048] Because different test products have different test items, the time required for each chip tested by the test machine is also different, and the generated test results are even more varied. Therefore, when the STDF data is disassembled, a fixed-frequency acquisition method is adopted. The acquisition frequency is set at 20HZ, and the size of the single-acquisition data is N. The range of N is set within the range of 10K-10M according to the amount of collected data. The collection efficiency can be guaranteed, and the real-time perform...

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Abstract

The invention provides a method for analyzing standard test data format (STDF) detection data in real time. The method includes the steps that real-time data collection is conducted, specifically,STDFs are collected and packaged at the fixed frequency; and real-time analysis is conducted, specifically,received data packets are disassembled and merged according to rules, and asingle complete datumis obtained for analysis. According to the method for analyzing the STDF detection data in real time, STDF files are analyzed in real time to help quickly discover the anomalies in the testing processin time, and thus the production losses are reduced to the minimum.

Description

technical field [0001] The invention relates to a method for analyzing STDF detection data in real time, belonging to the field of semiconductor testing. Background technique [0002] In the semiconductor CP testing industry, most test results of test machines are saved in STDF (Standard Test Data Format) format. The existing system imports the STDF file into the system for analysis after the wafer test is completed. Real-time analysis cannot be performed during the testing process of the wafer that comes down, resulting in the inability to verify the accuracy of the calibration in a timely manner. Contents of the invention [0003] The object of the present invention is to provide a method for real-time analysis of STDF detection data, analyze the STDF file in real time, find abnormalities in the test process in time and quickly, and minimize production loss. [0004] The present invention adopts following technical scheme: [0005] A method for analyzing STDF detectio...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/26G06F16/13
CPCG01R31/26
Inventor 陈湘芳
Owner SHANGHAI GLORYSOFT CO LTD
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