Method and system capable of controlling temperature change process of high-temperature environment aging life test box
An environmental test chamber and life test technology, used in semiconductor working life testing, single semiconductor device testing, etc., can solve problems such as poor control accuracy, complex operation, and poor test repeatability, and achieve the effect of improving consistency.
Active Publication Date: 2019-04-12
山东阅芯电子科技有限公司
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Problems solved by technology
1) The control accuracy is very poor, and it is difficult to ensure the same heating and cooling rates in the two tests, resulting in incompletely consistent temperature changes in each test and poor repeatability of the test
2) It is impossible to preset the temperature change process, such as letting the temperature rise and cool down according to a pre-designed change curve
3) Manual control is required and the operation is complicated
Method used
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Embodiment Construction
[0027] The present invention will be further described below in conjunction with specific drawings and embodiments.
[0028] Such as figure 2 and image 3 Shown: In order to accurately and quickly adjust the opening degree of the damper and realize the process of controllable temperature change, the present invention includes an environmental test chamber that can provide the required environment for the environmental aging test of the device under test; it also includes a damper baffle that can control the environmental test chamber 9. The damper damper control mechanism in the open state; the damper damper control mechanism is electrically connected to the system controller, and the temperature tolerance σ, the change step size of the damper damper 9 opening angle α, Δβ, Temperature control feedback cycle T wait ; The method comprises the steps of:
[0029] Step W1, determine the curve T of the target temperature in the environmental test chamber as a function of time ac...
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The invention belongs to the technical field of high-temperature environment aging tests, and relates to a control method and system, in particular to a method and system capable of controlling the temperature change process of a high-temperature environment aging life test box. A curve T<aim>(t) with the temperature variation with the time is preset; in the test process, according to the currentopening angle alpha of an air door baffle and the current temperature T<real> in the environment test box, the opening angle alpha of the air door baffle 9 is adjusted in real time through an air doorbaffle control mechanism; and finally, the temperature in the environment test box varies with the preset curve T<aim>(t) with the temperature variation with the time. According to a technology, thetemperature increasing process at the start of the environment aging life tests and the temperature decreasing process at the end of the environment aging life tests become more controllable, and thusconsistency of the test processes is improved advantageously.
Description
technical field [0001] The invention relates to a control method and system, in particular to a temperature control method and system for a high-temperature environment aging life test chamber, belonging to the technical field of high-temperature environment aging tests. Background technique [0002] High temperature environmental aging life test is a common method to evaluate the quality of semiconductor devices, such as HTRB (High Temperature Reverse Bias, high temperature reverse bias test), HTGB (High Temperature Gate Bias, high temperature gate bias test), HTFB (High Temperature Forward Bias, high temperature forward bias test) Partial test), HTOL (High Temperature Operating Life, high temperature operating life), etc. The principle of high-temperature environmental aging life test is to place semiconductor devices under high-temperature environmental conditions and apply specific electrical stress to quickly evaluate their life and reliability by accelerating the aging...
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Login to View More IPC IPC(8): G01R31/26
CPCG01R31/2642
Inventor 张文亮雷小阳李文江朱阳军
Owner 山东阅芯电子科技有限公司