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The invention discloses a dDouble-sided patterning method and a manufacturing method of a touch panel

A manufacturing method and patterning technology, applied in the photolithographic process of the patterned surface, the input/output process of data processing, optics, etc., can solve the problem of large accumulation tolerance, poor electrical connection of the second electrode, alignment deviation, etc. question

Active Publication Date: 2019-04-12
INTERFACE TECH CHENGDU CO LTD +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, multiple alignment exposures easily lead to large cumulative tolerances or alignment shifts, resulting in poor electrical connection between the second electrodes and lowering the yield of the touch panel.

Method used

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  • The invention discloses a dDouble-sided patterning method and a manufacturing method of a touch panel
  • The invention discloses a dDouble-sided patterning method and a manufacturing method of a touch panel
  • The invention discloses a dDouble-sided patterning method and a manufacturing method of a touch panel

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Embodiment Construction

[0031] figure 1 A flow chart of a double-sided patterning method according to an embodiment of the present invention is shown. Figures 2 to 6 A schematic cross-sectional view of each process stage in a method for a double-sided patterning process according to an embodiment of the present invention is shown. like figure 1 As shown, the method 10 includes step S11, step S12, step S13 and step S14.

[0032] In step S11, a transparent stack 100 is provided, such as figure 2 shown. The transparent stack 100 has a first surface 102 and a second surface 104 opposite thereto. In various embodiments, such as figure 2 As shown, the transparent stack 100 may include 3 layers, but is not limited thereto. In one embodiment, the transparent stack 100 may be any suitable transparent material.

[0033] In step S12, a first photoresist layer 110 with a pattern and a second photoresist layer 120 with a pattern are respectively formed on the first surface 102 and the second surface 104...

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Abstract

The double-sided patterning method comprises the following steps of: providing a transparent lamination layer; T; the transparent lamination layer is provided with a first surface and a second surfaceopposite to the first surface. Respectively forming a patterned first photoresist layer and a patterned second photoresist layer on the first surface and the second surface; Forming a transparent layer to cover the patterned first photoresist layer; A; and patterning the transparent layer by taking the patterned second photoresist layer as a mask. By utilizing the method, t, the accumulative alignment error among multiple lithography processes can be reduced.

Description

technical field [0001] The present invention relates to a double-sided patterning method and a manufacturing method of a touch panel. Background technique [0002] At present, touch panels have been widely used in display devices of various electronic products to facilitate users to control the electronic products. In order to make the electrodes in the touch area of ​​the touch panel difficult to be seen, indium tin oxide (ITO) is usually used to form the transparent conductive electrodes. The touch panel includes a first electrode extending along the first direction and a second electrode extending along the second direction and insulating and overlapping with the first electrode. [0003] In a touch panel with a single-layer conductive layer (Single ITO, SITO) structure, the first electrode and the second electrode are arranged on the same layer, and the intersection is insulated by an insulating layer. The second electrodes are located on both sides of the first electr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F3/041
CPCG06F3/0412G06F2203/04103G03F7/0957G03F7/0035G06F3/0443G06F2203/04111G06F3/0446G03F7/094G03F7/2002G03F7/38G06F3/045
Inventor 蔡汉龙陈秉扬陈俊铭
Owner INTERFACE TECH CHENGDU CO LTD