Single crystal furnace crystal bar clamping centering device and application method thereof

Abstract

For solving the problem of bar falling brought by manual operation in the prior art, the invention provides a single crystal furnace crystal bar clamping centering device and an application method thereof. The single crystal furnace crystal bar clamping centering device comprises a housing, a control module arranged inside the housing, a direction determining module, a position determining moduleand a gripping positioning module, wherein the direction determining module, the position determining module and the gripping positioning module are arranged on the housing; the direction determiningmodule comprises a line marker for projecting auxiliary lines onto the side wall of a furnace door for assisting levelling of a clamping jaw; the position determining module comprises a left range finer and a right range finer for measuring the distance between the left as well as the right and the furnace door; the gripping positioning module comprises a left positioning unit and a right positioning unit for measuring the distance between the left as well as the right and the inner wall of a furnace; the distance between the left range finer and the right range finder is greater than the width of the furnace door, and the left range finer and the right range finer are symmetrically arranged on one side of the housing, which faces towards the furnace door. The single crystal furnace crystal bar clamping centering device is high in reliability, and during application, can greatly improve reliability and reduce the production cost of enterprises.

Description

technical field [0001] The invention relates to the field of silicon single crystal production, in particular to a centering device used for auxiliary centering when a single crystal furnace clamps crystal rods in production and a method for clamping crystal rods thereof. Background technique [0002] Silicon single crystal is the key material for manufacturing IC integrated circuits and solar cells. With the rapid development of China's semiconductor industry, China will become the world's second largest semiconductor market after the United States. [0003] The Czochralski single crystal furnace is the main equipment for preparing silicon single crystal. The polycrystalline silicon is heated and melted, and the single crystal ingot is obtained by rotating and pulling, and the ingot is suspended in the upper furnace chamber by the seed crystal. Because the seed crystal is thinner, the material is more brittle, and the quality of the crystal rod is larger, the seed crystal i...

AI Technical Summary

Problems solved by technology

[0005] The object of the present invention is to provide a centering device and a method of use for clamping crystal rods in a single crystal furnace in order to solve the problem that the rods are easily dropped by manual operation in the prior art

The invention uses multiple sets of sensors to assist the mobile carrier equipped with grippers, such as a forklift, to align with the furnace door to achieve accurate alignment, effectively solving the problem of difficult positioning of the grippers

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