A laser galvanometer accuracy correction method, device and system

Abstract

The invention relates to a laser galvanometer precision correction method, device and system. The laser galvanometer precision correction method includes the following steps: a laser beam is controlled to pass through a laser galvanometer according to a preset standard graph, and then a plurality of identification points are engraved on a workpiece; according to acquired images including the identification points, an identification graph including all the identification points is determined; the standard graph and the identification graph are compared, and calibration parameters are determinedaccording to a comparison result; and a correction document of the laser galvanometer is updated according to the correction parameters. According to the technical scheme, the correction efficiency of the laser galvanometer can be improved, and the correction accuracy is ensured, so that the working efficiency of the whole process of laser processing is improved.

Description

technical field [0001] The invention relates to the technical field of laser processing, in particular to a method, device and system for correcting the accuracy of a laser vibrating mirror. Background technique [0002] During laser processing, the laser emits a laser beam with a fixed frequency, and the laser beam acts on the workpiece after the high-speed scanning motion of the galvanometer, and completes the corresponding graphic processing. In order to ensure the precision of graphic processing, the galvanometer needs to be calibrated. The existing correction method is mainly to process the grid point array on the workpiece after the laser beam passes through the vibrating mirror, such as 3×3, 15×15 grid point array, and then detect each The coordinate value of the grid point, and finally input the coordinate value into the calibration file of the galvanometer, so as to achieve the purpose of calibrating the galvanometer. [0003] With the long-term use of the laser a...

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Problems solved by technology

[0003] With the long-term use of the laser and the galvanometer, the accuracy of the galvanometer will change every once in a while due to external factors such as ambient temperature, humidity, vibration, and the temperature drift of the galvanometer itself. In order to correct the deviation of the galvanometer, it is necessary to constantly adjust it For correction, the existing correction method needs to reprocess the grid point every time it is calibrated, and detect the coordinates of the grid point on the detection instrument, and finally input the obtained coordinate data into the galvanometer calibration file. The process is quite complicated and lengthy , the correction efficiency is low, which in turn affects the entire laser processing process

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