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A filter and piezoelectric layer technology, applied in the field of radio frequency technology and MENS, can solve the problem of not providing, and achieve the effect of lowering the design threshold
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AI technical title is built by PatSnap AI team. It summarizes the technical point description of the patent document.
A filter and piezoelectric layer technology, applied in the field of radio frequency technology and MENS, can solve the problem of not providing, and achieve the effect of lowering the design threshold
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[0109] Below, the present invention will be further described in conjunction with the accompanying drawings and specific implementation methods. It should be noted that, under the premise of not conflicting, the various embodiments described below or the technical features can be combined arbitrarily to form new embodiments. .
[0110] The structure of a FBAR provided by the embodiment of the present invention is as follows: figure 1 As shown, a silicon substrate 11 made of a single crystal is included, a cavity 12 is etched on the silicon substrate 11, a support layer 13 is arranged on the silicon substrate 11, and the support layer 13 and the silicon substrate 11 together form the cavity 12 form a closed space. The lower electrode layer 14 and the piezoelectric layer 15 are arranged on the supporting layer, and the upper electrode layer 16 is arranged on the piezoelectric layer. The upper electrode layer 16 , the piezoelectric layer 15 and the lower electrode layer 14 form...
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Abstract
The invention discloses an FBAR design and design inspection method. The method comprises the following steps of converting an application demand into input of a technical requirement, establishing asimulation model from a key index through a theoretical basis, optimizing, and preparing a prototype sample. The design parameters are deduced from theory to design and then to production, so that thedesign parameters can be compared with the design before preparation, the mutual deduction relationship between the design and the product is established, and the design and design inspection is realized. According to the invention, the FBAR is applied to the design of a filter and a power divider; a set of systematic and efficient method is provided to enable the FBAR to be designed and some problems existing in the design implementation process to be solved, and the process is considered in combination to enable the preparation implementation, so that by designing an inspection part, a recyclable process between the design and the preparation can be further improved.
Description
technical field [0001] The invention relates to the fields of radio frequency technology and MENS technology, in particular to the design and manufacture of FBAR and the manufacturing method of FBAR filter. Background technique [0002] In order to meet more communication functions and better communication experience, modern communication technology needs to meet higher efficiency and integration requirements. The filter constructed by FBAR cascade has high Q value, low insertion loss, good square coefficient, good direction selectivity, good zero depth, good out-of-band suppression and other performance advantages. Moreover, it is small in size, Compatible with COMS technology, can do integration. In addition, the working frequency can be high frequency, therefore, the filter constructed by FBAR cascade can well meet these requirements of modern communication technology. [0003] FBAR (film bulk acoustic resonator, thin film cavity acoustic resonance) is a constructed com...
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