High-voltage LED chip structure and manufacturing method thereof

Abstract

The invention relates to a high-voltage LED chip structure and a manufacturing method thereof. The high-voltage LED chip structure comprises a plurality of LED sub-chips. wherein each LED sub-chip comprises a substrate, an epitaxial layer located on the substrate, a first electrode and a second electrode, the first electrode and the second electrode are located on the epitaxial layer, an isolationdeep groove is formed between every two adjacent LED sub-chips, and a bridging insulation isolation layer is arranged in a partial area of each isolation deep groove. And the side wall of the epitaxial layer corresponding to the part of the isolation deep grooves covered with the bridging insulation isolation layers is a non-coarsened side wall, and the side walls of the epitaxial layers in otherareas are coarsened side walls. The side wall of the epitaxial layer is coarsened, so that light which is directly emitted in the side direction can be reduced, the light which is emitted in the sidedirection is reflected to the front surface of the LED chip to be emitted, and the light emitting efficiency of the high-voltage LED chip structure is further improved. Meanwhile, the bridging insulation isolation layer is arranged to be a non-coarsened side wall, so that the problem of poor coverage of the insulation layer at the bridging position caused by coarsening of the side wall of the epitaxial layer can be avoided.

Description

technical field [0001] The invention relates to the technical field of manufacturing semiconductor devices, in particular to a high-voltage LED chip structure and a manufacturing method thereof. Background technique [0002] The light-emitting principle of light-emitting diodes (LEDs) is to use the energy difference between electrons moving between n-type semiconductors and p-type semiconductors to release energy in the form of light. This light-emitting principle is different from that of incandescent lamps, so light-emitting diodes are used called a cold light source. In addition, light-emitting diodes have the advantages of high durability, long life, light weight, and low power consumption. Therefore, today's lighting market places high hopes on light-emitting diodes and regards them as a new generation of lighting tools. [0003] However, the current LED chip still has the problem of low luminous efficiency. Therefore, improving the luminous efficiency of light-emitti...

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Problems solved by technology

[0006] In view of this, the present invention provides a high-voltage LED chip structure and its manufacturing method to solve the problem that the output efficiency of high-voltage LED chips in the prior art is low and needs to be improved

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