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An image quality compensation device and method and an optical system

A compensation device and image quality technology, which is applied in the direction of optics, optical components, and exposure devices for photographic plate-making processes, can solve the problems of high difficulty, single compensation, and high cost, and achieve the effect of reducing difficulty and cost

Active Publication Date: 2021-03-09
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a quality compensation device to solve the problems of single compensation, high difficulty and high cost in existing image quality compensation schemes

Method used

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  • An image quality compensation device and method and an optical system
  • An image quality compensation device and method and an optical system
  • An image quality compensation device and method and an optical system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] like figure 1 As shown, the image quality compensation device includes a lens barrel 8, a rotating mechanism 9 and a force applying mechanism 10, the lens barrel contains a lens 7, and the lens 7 is a movable lens, and the lens barrel 8 is located in the rotating On the mechanism 9, it rotates with the rotation of the rotating mechanism 9. The force applying mechanism 10 is located on the rotating mechanism 9 and rotates while locking the rotation of the rotating mechanism 9. The force applying mechanism 10 is opposite to the mirror The barrel 8 exerts pressure to deform the lens barrel 8 , and the lens barrel further transmits the pressure to the lens 7 to deform the upper and lower surfaces of the lens 7 .

[0038] figure 2 is a cross-sectional view of the image quality compensation device, please refer to figure 2 , the image quality compensation device further includes a mirror base 15 , and the mirror base 15 is located around the lens 7 . The rotating mechani...

Embodiment 2

[0045] Please refer to Figure 7 , the image quality compensation device includes a lens barrel 8, a rotating mechanism 9 and a force applying mechanism 10, the lens barrel contains a lens 7, and the shown lens barrel 8 is located on the rotating mechanism 9, along with the rotating mechanism 9 The rotation of the rotating mechanism 10 is located on the rotating mechanism 9 and rotates while locking the rotation of the rotating mechanism 9. The applying mechanism 10 applies pressure to the lens barrel 8 so that the lens barrel 8 deformation, the lens barrel further transmits pressure to the lens 7, causing the upper and lower surfaces of the lens 7 to deform.

[0046] continue to refer Figure 8 , the image quality compensation device further includes a mirror base 15 , and the mirror base 15 is located around the lens 7 . There is a flexible block 16 under the lens barrel 8 , and the flexible block 16 can bear the weight of the lens 7 . The rotating mechanism 9 includes a ...

Embodiment 3

[0049] Correspondingly, the present invention also provides an optical system, the optical system includes an image quality compensation device, and the image quality compensation device adjusts an aberration item group to realize image quality compensation, and the aberration item group has a certain rotation angle Two types of aberration items or multiple types of aberration items related to each other. In this embodiment, two types of aberration items are used as an aberration item group as an example for illustration. The image quality compensation device is the image quality compensation device provided in any one of the above embodiments. The difference term is any one of Zernike polynomials, such as Z5, Z6 or Z7. The phase difference item group is two types of phase difference items with a certain angular relationship, such as Z5 and Z6, Z12 and Z13 and so on. The working principle of the optical system will be explained in detail below.

[0050] The optical system in...

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Abstract

The invention provides an image quality compensation device, which includes a lens barrel, a force applying mechanism and a rotating mechanism. The force applying mechanism exerts pressure on the lens barrel to deform the lenses in the lens barrel. The lens barrel is located at The rotation mechanism rotates with the rotation of the rotation mechanism. The image quality compensation device, method and optical system provided by the present invention can realize image quality compensation through the rotation and deformation of the lens, and can compensate various image quality , which reduces the difficulty of image quality compensation and also reduces the cost.

Description

technical field [0001] The invention relates to the technical field of semiconductor integrated circuit manufacturing, in particular to an image quality compensation device and method and an optical system. Background technique [0002] In the current field of semiconductor packaging technology, lithography objective lenses used for manufacturing integrated circuit chips usually have high resolution and large depth of focus to realize the preparation of highly integrated chips. At the same time, in order to meet the image quality requirements of the exposed area during chip preparation, the optical imaging system for projection exposure needs to have a good image quality compensation capability. In order to meet the higher technical requirements of the product, it is necessary to continuously reduce the feature size of the chip, which also puts forward stricter requirements on the imaging quality of the optical system. Therefore, improving the imaging quality of the optical...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20G02B7/02
CPCG02B7/02G03F7/20
Inventor 宋珊珊郭银章
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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