Long interference optical cavity tuning device and method based on self-compensating translation axis
A tuning device and translation axis technology, which is applied in the field of optical measurement, can solve the problems such as the inability to directly install and adjust, and the difficulty in installing and calibrating long interference optical cavities, and achieve the effect of good interference parameters
Inactive Publication Date: 2020-05-08
BEIJING GAS GRP
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Problems solved by technology
Generally, short-distance interferometry equipment, such as Michelson interferometer, etc., are relatively easy to install and adjust, and can be completed by using equipment such as autocollimators. Due to the influence of mechanical precision, precision of installation and adjustment instruments, and manual errors, it is very difficult to further improve the installation and calibration accuracy of long interference optical cavities
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[0015] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0016] Such as figure 1 As shown, the long interference optical cavity tuning device based on the self-compensating translational axis of the embodiment of the present invention includes a laser 1, a sliding table 2 installed on a precision guide rail, and a first translational axis interferometry module installed on the sliding table 2 3 and the second translation axis interferometry module 4, imaging lens 5, image sensor 6 and computer 7. Among them, the la...
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The invention provides a long interference optical cavity tuning device and method based on a self-compensating translation axis. The device comprises a laser, sliding tables, first and second translation axis interference measurement modules, an imaging lens, an image sensor and a computer, wherein the sliding tables are mounted on a precision guide rail; the sliding tables can move between firstand second interference optical cavity endoscopes along a preset light path; the first and second translation axis interference measurement modules are arranged on the sliding tables; each translation axis interference measurement module comprises a first small collimation hole, a beam splitting prism, a second small collimation hole and first and second interference measurement module endoscopes, which are sequentially arranged on the preset light path; the first and second interference measurement module endoscopes are arranged at both sides of the beam splitting prisms and positioned on corresponding interference light paths; the interference light paths of the first and second translation axis interference measurement modules are perpendicular to each other; the imaging lens is used for carrying out imaging on interference images of the first and second translation axis interference measurement modules; the image sensor is used for outputting digital images of the interference images; and the computer is used for processing the digital images and feeding back a self-compensating multi-axis precision regulation strategy according to a processing result.
Description
technical field [0001] The invention relates to the technical field of optical measurement, in particular to a long interference optical cavity tuning device and a long interference optical cavity tuning method based on a self-compensating translation axis. Background technique [0002] The interferometric optical measurement system is the core device of modern laser interferometry, spectral detection equipment and other applications. Its intracavity mode characteristics and structural dimensional stability are key characteristics that directly affect its performance. The use of interference spectroscopy technology, interference signal processing and other technologies can qualitatively and quantitatively measure various physical quantities of things, such as spatial position, composition, concentration, etc. It is a precision optical measurement method that uses time and space signals as measurement references. It has the advantages of strong interference ability, good meas...
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IPC IPC(8): G01M11/02
Inventor 张涛焦建瑛李清王嵩梅张研超何少平李彦爽
Owner BEIJING GAS GRP