Method and device for detecting surface topography and subsurface defect information of optical element
A technology of subsurface defects and optical components, which is applied in the direction of optical devices, optical testing flaws/defects, and measuring devices, can solve problems such as imperfect detection, and achieve high measurement capabilities, high measurement efficiency, and high measurement accuracy.
Active Publication Date: 2021-04-06
XIAN TECH UNIV
View PDF7 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
The traditional existing technology is not perfect for the detection of subsurface defects of optical components, such as the position and depth information of internal defects of components, etc.
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0026] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0027] The steps of the detection method for the surface topography and subsurface defect depth information of the optical element are as follows:
[0028] Step 1: A beam of wide-spectrum polychromatic light is emitted from the light source through the small hole S, and after passing through the polarizer 2, the ordinary light source is converted into linearly polarized light with a vibration direction perpendicular to the XOY plane, and irradiated on the dispersion lens group;
[0029] Step 2: The light passes through the dispersive lens to undergo spectral dispersion, thereby dispersing the white...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention relates to a method and a device for detecting surface topography and subsurface defect information of an optical element. It uses wavelength information to measure distance, and a beam of wide-spectrum polychromatic light (white) is emitted from the light source, and spectral dispersion occurs through the dispersion lens to form monochromatic light of different wavelengths. The focal point of each wavelength corresponds to a distance value; the measurement light When it hits the surface of the object and is reflected back, only the monochromatic light that meets the confocal condition can be sensed by the spectrometer through the small hole, and the distance value can be obtained by calculating the wavelength of the sensed focal point. Two spectrometers are used to receive the light wave information of the surface and internal defects of the component to be tested respectively, so as to obtain the surface information of the optical component and the position and depth information of the internal defects at the same time.
Description
technical field [0001] The invention relates to a method and a device for detecting surface topography and subsurface defect information of an optical element. Background technique [0002] With the energy improvement and continuous development of high-power solid-state laser systems, the requirements for the quality of optical components are getting higher and higher. A large number of studies on the damage mechanism of components at home and abroad have shown that the subsurface defects generated during the grinding and polishing of optical components are one of the important factors that lead to the decline of the damage resistance of optical components. Therefore, how to effectively detect and evaluate subsurface defects of different depth dimensions and topographic features of optical components, so as to guide component processing and effectively control subsurface defects generated in each process link has become a cutting-edge requirement for high-threshold laser dam...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/88G01B11/24
Inventor 王红军吴琳田爱玲刘卫国王大森朱学亮刘丙才
Owner XIAN TECH UNIV