Micro force control system based on interference differential displacement method
A differential displacement and control system technology, applied in control/regulation systems, non-electric variable control, mechanical pressure/force control, etc. The effect of improving accuracy and simple structure
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[0020] Such as figure 1 , 2 As shown, the micro-force control system of the interference differential displacement method disclosed in this embodiment is composed of a control and information output module, an optical measurement module 2 and a micro-force generating module 3 . The control and information output module 1 is used for optical measurement signal measurement, micro force generation and calculation, and external communication of control and signals. The measured value and calculated control value of the optical measurement module 2 and the micro force value establish a corresponding relationship, and the comprehensive calculation output Small force data. The micro-force generating module 3 utilizes the electrostatic force method, and adopts a comb structure to improve the resolution and range of the electrostatic force to obtain micro-force values. The system controls the change of electrostatic force and uses the method of elastic deformation of the structure to...
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