Micro force control system based on interference differential displacement method

Abstract

The micro force control system disclosed by the invention belongs to the technical field of precision measurement. The invention is mainly composed of a control and information output module, an optical measurement module and a micro force generation module. The control and information output module is used for measuring optical measurement signals, micro force generation, calculation, control and external communication of signals. The optical measurement module is used to establish the corresponding relationship between the measured value and the calculated control value and the micro force value, and comprehensively calculate and output the data of the micro force. The micro force generation module uses the electrostatic force method, and adopts the comb structure to improve the resolution and range of the electrostatic force to obtain the micro force value. The invention can accurately determine the magnitude of the tiny force value through the interference method to accurately change the displacement of the tiny force value under various environmental conditions of the tiny force value. The invention has high adaptability and accuracy and compact structure. and value metrics.

Description

technical field [0001] The invention relates to a micro force control system of an interference differential displacement method, which belongs to the technical field of precision measurement. Background technique [0002] Micro-force value control and measurement are widely used in the field of motion systems and precision testing technology. It is an important means of high-precision force value reproduction and application at present, and it is of great significance in complex structures and systems. Micro force is difficult to control, use and measure due to the range of force value, and it needs to cooperate with corresponding characteristic structures, methods and equipment to accurately obtain and use it. The generation and reproduction of tiny force values ​​can be realized by means of precision actuators or fine elastic structural deformation. The realization of these methods requires precise measurement and feedback systems for accurate tiny force values ​​to occur...

AI Technical Summary

Problems solved by technology

[0003] In order to solve the problem that the existing micro-force value control system and the force value in the measurement are difficult to control and reproduce, the technical problem to be solved by the micro-force control system of the interference differential displacement method disclosed by the present invention is: to provide a kind of interference control system using the principle of elasticity The differential displacement method micro force control system can accurately determine the magnitude of the micro force value through the interference method to accurately change the displacement of the micro force value under various environmental conditions of the micro force value

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