The invention discloses a flexible pressure-temperature integrated film array sensor sensitive element and a preparation method thereof. The
pressure sensing function and the
temperature sensing function are integrated by utilizing a piezoelectric effect and a pyroelectric effect of a flexible ferroelectric film, and the sensitive element comprises a flexible substrate, a functional film assemblyand a thermal management film
assembly. In the method, an insulating layer and a lower
electrode are sequentially deposited on a flexible substrate, a wire is connected, a flexible ferroelectric thinfilm is deposited and an insulating groove is etched, an upper
electrode is deposited on the flexible ferroelectric thin film, the wire is connected, a
thermal control layer, a thermal conductive layer and an
infrared reflective layer are sequentially deposited, and finally the sensitive element is polarized and tested through the wire. The sensitive element of the invention realizes the integration of the
pressure sensing function and the
temperature sensing function on a single sensitive element, and has high integration level and simple use structure, is suitable for large-area preparation,suitable for plane, curved surface, special-shaped surface and other structures, high adaptability, and has the advantages of
shock resistance, strong vibration ability, high bionic degree, high reliability and the like.