Array substrate, manufacturing method thereof and display panel

A technology of an array substrate and a manufacturing method, which are applied in the fields of an array substrate and a manufacturing method thereof and a display panel, can solve the problems of easy occurrence of undercutting, abnormal display of a liquid crystal panel, etc., and achieve the effects of reducing density and improving the undercutting phenomenon.

Active Publication Date: 2019-06-28
HKC CORP LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] In the manufacture of array substrates, when the insulating layer on the surface of the metal layer is etched to form contact holes, the phenomenon of undercutting (Passivation Undercut) is prone to occur, and in severe cases, it may directly lead to abnormal display of the LCD panel

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  • Array substrate, manufacturing method thereof and display panel
  • Array substrate, manufacturing method thereof and display panel
  • Array substrate, manufacturing method thereof and display panel

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[0045] It should be understood that the terminology and specific structural and functional details disclosed herein are representative only for describing specific embodiments, but the application can be embodied in many alternative forms and should not be construed as merely Be limited by the examples set forth herein.

[0046] In the description of the present application, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating relative importance, or implicitly indicating the quantity of indicated technical features. Therefore, unless otherwise specified, the features defined as "first" and "second" may explicitly or implicitly include one or more of these features; "plurality" means two or more. The term "comprising" and any variations thereof mean non-exclusive inclusion, possible presence or addition of one or more other features, integers, steps, operations, units, components and / or combinations thereof.

[0047] Al...

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Abstract

The invention discloses an array substrate, a manufacturing method thereof and a display panel. The manufacturing method comprises the steps that a first metal layer is formed; nitrogen and ammonia gas are input onto the first metal layer to form an adhesion layer; a first insulation layer is formed on the adhesion layer; the first insulation layer is etched to form a through hole out of which thefirst metal layer is exposed; a transparent electrode layer connected with the first metal layer via the through hole is formed on the first insulation layer; and the adhesion force between the adhesion layer and the first insulation layer is greater than that between the first metal layer and the first insulation layer. The adsorption affinity of the first insulation layer is enhanced via the adhesion layer, so that the etching speed of the first insulation layer is lower, and an undercutting phenomenon is overcome.

Description

technical field [0001] The present invention relates to the field of display technology, in particular to an array substrate, a manufacturing method thereof, and a display panel. Background technique [0002] As the main medium for transmitting information, liquid crystal displays have been widely used in various fields of work and life. But few people know that the seemingly simple LCD panel requires hundreds of processes to make. Generally speaking, a liquid crystal display panel is composed of an array substrate including active elements such as thin film transistors, a color filter substrate including color filters and other elements, and a liquid crystal cell sandwiched therein. The transparent electrode layer on the surface of the array substrate needs to be in contact with the Metal plane connections in active switches. [0003] In the manufacture of the array substrate, when the insulating layer on the surface of the metal layer is etched to form a contact hole, th...

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Application Information

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IPC IPC(8): H01L27/12H01L21/77G02F1/1335G02F1/1362
Inventor卓恩宗莫琼花杨凤云刘振张合静
OwnerHKC CORP LTD