An array substrate and its manufacturing method and display panel
The technology of an array substrate and a manufacturing method is applied in the fields of an array substrate and a manufacturing method thereof and a display panel, which can solve the problems of easy occurrence of undercutting, abnormal display of a liquid crystal panel, etc., and achieve the effects of increasing the molding speed and improving the undercutting phenomenon.
Active Publication Date: 2022-08-05
HKC CORP LTD
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Problems solved by technology
[0003] In the manufacture of array substrates, when the insulating layer on the surface of the metal layer is etched to form contact holes, the phenomenon of undercutting (Passivation Undercut) is prone to occur, and in severe cases, it may directly lead to abnormal display of the LCD panel
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[0044] It should be understood that the terminology used herein and the specific structural and functional details disclosed are only for describing specific embodiments and are representative, but the present application may be embodied in many alternative forms and should not be construed as only Limited by the embodiments set forth herein.
[0045] In the description of this application, the terms "first" and "second" are only used for description purposes, and cannot be understood as indicating relative importance, or implicitly indicating the number of indicated technical features. Thus, unless otherwise stated, features defined as "first" and "second" may expressly or implicitly include one or more of the features; "plurality" means two or more. The term "comprising" and any variations thereof mean non-exclusive inclusion, possibly the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or combinations thereof.
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Abstract
The invention discloses an array substrate, a manufacturing method thereof, and a display panel. The manufacturing method of the array substrate comprises the steps of: forming a first metal layer; passing nitrogen gas and ammonia gas on the first metal layer to form an adhesion layer; forming a first insulating layer; etching the first insulating layer to form via holes exposing the first metal layer; and forming a transparent electrode layer connected to the first metal layer through the via holes on the first insulating layer; an adhesion layer The adhesion with the first insulating layer is greater than the adhesion between the first metal layer and the first insulating layer. The adsorption force of the first insulating layer is increased by the adhesion layer, so that the etching speed of the first insulating layer is relatively slow, thereby improving the undercutting phenomenon.
Description
technical field [0001] The present invention relates to the field of display technology, and in particular, to an array substrate, a manufacturing method thereof, and a display panel. Background technique [0002] As the main medium for transmitting information, liquid crystal displays have been widely used in various fields of work and life. But few people know that the seemingly simple LCD panel requires hundreds of processes to make. Generally speaking, a liquid crystal display panel is composed of an array substrate containing active elements such as thin film transistors, a color filter substrate containing elements such as color filters, and a liquid crystal cell sandwiched therein. The transparent electrode layer on the surface of the array substrate needs to be Metal layer connections in active switches. [0003] In the fabrication of the array substrate, when the insulating layer on the surface of the metal layer is etched to form contact holes, a phenomenon of un...
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IPC IPC(8): H01L27/12H01L21/77G02F1/1335G02F1/1362
Inventor 卓恩宗杨凤云刘振莫琼花
Owner HKC CORP LTD