Wafer box rotating mechanism and loading chamber

A technology of rotating mechanism and loading cavity, applied in the directions of transportation and packaging, conveyor objects, electrical components, etc., can solve the problems of unergonomic operation, inability to return the cassette, and large opening width of the cavity, etc. The effect of improving the production yield of the process, improving the yield of the chip, and saving the time of taking the chip

CN109962029AActive Publication Date: 2019-07-02BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2019-07-02

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Abstract

The invention discloses a wafer box rotating mechanism and a loading chamber. The wafer box rotating mechanism comprises a supporting base, a rotating support seat and a moving assembly. The supporting base can move linearly in the vertical direction under the action of a driving force. The rotating support seat is located on the supporting base, and one end of the rotating support seat is rotationally connected with one end of the supporting base. The rotating support seat is used for loading a wafer box. The moving assembly comprises a guide rail, a moving part and an elastic part. The moving part is connected to the side of the rotating support seat. The guide rail is fixedly arranged on the side wall of a loading chamber. During downward movement of the supporting base, the guide railcan contact the moving part and prevent the moving part from moving downward, so that the rotating support seat rotates from a vertical position to a horizontal inverted position. The elastic part isused for exerting a restoring force on the rotating support base so that the rotating support base rotates from the horizontal inverted position to the vertical position. A wafer can be accurately located in a wafer box, the yield of wafer taking can be improved, and the time for wafer taking can be saved.
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Description

technical field

[0001] The invention relates to the technical field of semiconductor equipment, in particular to a chip box rotating mechanism and a loading chamber comprising the chip box rotating mechanism. Background technique

[0002] In the traditional semiconductor equipment transmission system, such as figure 1 As shown, the transmission system includes a loading chamber 200 , a transmission chamber 300 and a process chamber 400 , wherein the loading chamber 200 is provided with a cassette 210 and a lifting assembly 220 , and the transmission chamber 300 is provided with a manipulator 310 . Specifically, the lifting assembly 220 drives the cassette 210 to move linearly along the vertical direction, so as to facilitate the manipulator 310 in the transfer chamber 300 to take out wafers from the cassette 210 . Among them, taking out wafers from the cassette 210 is the first step in the automatic transfer process of many semiconductor devices, so the efficiency and relia...

Examples

Embodiment Construction

[0074] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to illustrate and explain the present invention, and are not intended to limit the present invention.

[0075] Such as Figure 6 to Figure 11 As shown, the first aspect of the present invention relates to a cassette rotating mechanism 100 . Wherein, the cassette rotating mechanism 100 includes a supporting base 110 , a rotating supporting base 120 and a moving assembly 130 .

[0076] The support base 110 mentioned above can move linearly in the vertical direction under the action of the driving force. For example, the support base 110 can be connected with the lifting assembly 220 described below, which provides the driving force for the support base 110 . That is to say, driven by the lifting assembly 220 , the support base 110 can move linearly in the vertical...