Optical device surface cleaning device and scanning inspection system
A surface cleaning device and optical device technology, applied in the field of scanning inspection, can solve the problems of reducing sensor sensitivity, misjudgment, maintenance difficulty and maintenance volume increase, so as to reduce maintenance cost and maintenance difficulty, reduce false detection rate, and improve use efficiency effect
Pending Publication Date: 2019-07-12
NUCTECH CO LTD +1
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Problems solved by technology
[0002] When the current optical sensors and cameras are used for a long time, due to the influence of dust, the sensitivity of the sensor detection surface or the camera lens will decrease, and in severe cases, the sensor will fail and misjudgment will occur.
At present, only a dust cover or manual wiping can be added to the sensor or camera to reduce the impact of dust, and the dust cover cannot block the sensor detection surface and camera lens, otherwise the sensitivity of the sensor will be reduced
[0003] At present, in the use of equipment, maintenance personnel can only rely on the frequent wiping of the sensor detection surface and camera lens, which greatly increases the difficulty and amount of maintenance, which affects the customer's equipment use experience
Method used
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[0030] The present invention will be described in detail below. In the following paragraphs, different aspects of the embodiments are defined in more detail. Aspects so defined may be combined with any other aspect or aspects unless specifically stated otherwise. In particular, any feature considered to be preferred or advantageous may be combined with one or more other features which are considered to be preferred or advantageous.
[0031] Terms such as "first" and "second" appearing in the present invention are only for convenience of description, to distinguish different components with the same name, and do not indicate a sequence or a primary and secondary relationship.
[0032] In the description of the present invention, orientations or positional relationships indicated by "upper", "lower", "top", "bottom", "front", "rear", "inner" and "outer" are used based on the attached The orientation or positional relationship shown in the figure is only for the convenience of ...
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The invention relates to an optical device surface cleaning device and a scanning inspection system. The optical device surface cleaning device comprises an air blowing part (5) and an air source assembly. An air blowing opening (53) is formed in a flow guide surface (53) and faces a to-be-cleaned surface (6) of an optical device. The air source assembly is arranged to supply compressed gas to theflow guide surface (53), so that the compressed gas can be blown to the to-be-cleaned surface (6) through the air blowing opening (53) for decontamination. The cleaning device can automatically cleanthe surface of the optical device by blowing compressed air, so that the maintenance cost and maintenance difficulty of the optical device can be reduced, the false rate of optical device detection can be reduced, the equipment use efficiency can be improved, and customers can have a better equipment using experience.
Description
technical field [0001] The invention relates to the technical field of scanning inspection, in particular to an optical device surface cleaning device and a scanning inspection system. Background technique [0002] When the current optical sensors and cameras are used for a long time, due to the influence of dust, the sensitivity of the sensor detection surface or the camera lens will decrease, and in severe cases, the sensor will fail and misjudgment will occur. At present, only a dust cover or manual wiping can be added to the sensor or camera to reduce the impact of dust, and the dust cover cannot block the sensor detection surface and camera lens, otherwise the sensitivity of the sensor will be reduced. [0003] At present, in the use of equipment, maintenance personnel can only rely on frequent wiping of the sensor detection surface and camera lens, which greatly increases the difficulty and amount of maintenance, which affects the customer's equipment use experience. ...
Claims
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Login to View More IPC IPC(8): B08B5/02G01N21/94
CPCB08B5/02G01N21/94G01N2021/945
Inventor 李柯许艳伟孟德芳叶立超喻卫丰胡煜宗春光孙尚民
Owner NUCTECH CO LTD