Wafer Cassette Basket

Abstract

The invention relates to the technical field of semiconductor wafer processing, in particular to a wafer cassette basket. The wafer cassette basket includes a support plate, a bottom plate and an angle adjustment device; the support plate and the bottom plate enclose a wafer cassette accommodation space; the angle adjustment device includes a guide plate, an active adjustment screw and a driven adjustment screw; the guide plate is located on the edge of the bottom plate Above one end of the first direction, the two ends of the guide plate along the second direction are respectively provided with an active adjustment screw and a driven adjustment screw; the threaded end of the active adjustment screw is connected to the bottom plate in rotation, and the threaded end of the driven adjustment screw is offset against the bottom plate Rely; turn the active adjustment screw and the driven adjustment screw, the guide plate will move along the axis direction of the active adjustment screw, thereby changing the distance between the guide plate and the bottom plate, and the two ends of the wafer cassette along the first direction are placed on the The guide plate and the bottom plate with height difference can tilt the wafer at a certain angle, so that it can achieve better cleaning effect during cleaning.

Description

technical field [0001] The invention relates to the technical field of semiconductor wafer processing, in particular to a wafer cassette basket. Background technique [0002] With the continuous expansion and development of IC and related industries, the process requirements for wafer cleaning are getting higher and higher; with the continuous improvement of cleaning process technology, more and more manufacturers find that when the wafer cassette is tilted at a certain angle The effect of cleaning is better than that of laying flat. At present, the wafer cassettes of automatic wafer cleaning equipment are placed flat, and the wafer cannot be tilted at a certain angle, and the tilt angle can be adjusted; this greatly increases the wafer. Due to the difficulty of soaking and cleaning the circle, it is difficult to achieve the ideal cleaning effect. Contents of the invention [0003] The object of the present invention is to provide a wafer cassette basket to solve the tech...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a wafer cassette basket to solve the technical problem in the prior art that the tilt angle of the wafer cassette cannot be adjusted when the wafer is being cleaned to a certain extent

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