Liquid box and liquid circulation device

Abstract

The invention discloses a liquid box and a liquid circulation device. The liquid box comprises a box body, a partition plate arranged in the box body, and an exhaust tube for communicating the internal of the box body with an external environment; the partition plate divides the box body into a liquid inlet chamber and a liquid outlet chamber, the bottom of the liquid inlet chamber is communicatedwith the bottom of the liquid outlet chamber, and the top of the liquid inlet chamber is communicated with the top of the liquid outlet chamber; and the partition plate is used for blocking bubbles generated in the liquid inlet chamber from flowing to the liquid outlet chamber, and the exhaust tube is used for discharging the overflowing bubbles. The problems of incomplete avoiding of the bubblesfrom being sucked into a circulation pipeline by a pump body, troublesome operation and liquid leakage risk of manual exhaust are solved, and the liquid box has the advantages of realization of automatic exhausting, prevention of the generated bubbles from entering the liquid circulation pipeline, reduction of the risk of liquid leakage, simple structure and low cost.

Description

technical field [0001] Embodiments of the present invention relate to the technical field of liquid circulation systems, and in particular, to a liquid tank and a liquid circulation device. Background technique [0002] Liquid circulation systems or equipment are widely used in various industries, such as fan coil systems in the HVAC industry, lithography machine environmental subsystems in the semiconductor industry, and external auxiliary liquid temperature control equipment for etching machines. [0003] In equipment with high requirements on the operating environment of the equipment, the liquid circulation system is an important guarantee to ensure the normal operation of the equipment. In semiconductor equipment, especially high-precision lithography machines, the liquid circulation system needs to continuously and reliably provide the operating environment for the normal operation of the lithography machine. [0004] However, the generation of air bubbles in the liqu...

AI Technical Summary

Problems solved by technology

However, since the circulation pipeline is continuously circulating the liquid, the generation of air bubbles is also continuous, and regular manual exhaust cannot completely prevent the air bubbles from being sucked into the circulation pipeline by the pump body

In addition, due to the limited building space, the area reserved for maintenance is very limited. It is extremely inconvenient to manually exhaust gas when there is a problem of gas entering the circulation pipeline, and it is necessary to open the pump tank to vent the air, which is troublesome to operate and has the risk of leakage

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