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An Improved Defocused Series Iterative Wavefunction Reconstruction Method

A wave function, a series of technologies, applied in the field of transmission electron microscope application technology and image processing, to achieve the effect of solving registration difficulties, high registration accuracy and good reconstruction effect

Active Publication Date: 2021-11-19
HUNAN UNIV
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  • Application Information

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Problems solved by technology

These methods all have large errors when the step size of the underfocus of two adjacent images in the series is large

Method used

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  • An Improved Defocused Series Iterative Wavefunction Reconstruction Method
  • An Improved Defocused Series Iterative Wavefunction Reconstruction Method
  • An Improved Defocused Series Iterative Wavefunction Reconstruction Method

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Embodiment Construction

[0055] The present invention will be further described in detail through a specific embodiment. The following examples are used to illustrate the present invention, but the specific embodiments of the present invention are not limited to the following examples.

[0056] The transmission sample used in the present embodiment is 2000 series aluminum alloy, and the transmission electron microscope used is FEI Tecnai F20, and the incident direction of electron beam is [001] Al .

[0057] S1: Perform conventional centering operations on the electron microscope, and make the electron beam incident along the [001] direction of the aluminum substrate of the sample, with a magnification of about 590,000 times, and record a set of (N sheets) under the condition of -229.3nm underfocus , N=20) and other low-focus series high-resolution images of the under-focus step length, the number of pixels of the image is 1024*1024, and the under-focus step size is -4.77nm, such as figure 2 shown....

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Abstract

The invention discloses an improved iterative wave function reconstruction method for recovering the wave function of the lower surface of a sample by using a series of low-focus high-resolution images. The method is based on the traditional iterative wave function reconstruction method and the method of electron wave propagation in vacuum. In the present invention, the reconstructed high-resolution image at the plane can be obtained by propagating the initial wave function reconstructed from the two images to the next underfocus plane. By comparing the reconstructed image with the experimentally recorded image, this method can effectively eliminate the difference in image contrast introduced by the difference in the amount of underfocus, so that the relative drift between the two images and the image after registration can be solved . Through continuous iteration of the above methods, the precisely registered images can be obtained, and the final wave function can be obtained. The invention solves the long-standing problem of being unable to accurately register under-focus series images, and establishes a foundation for quantitative analysis of high-resolution images.

Description

technical field [0001] The invention discloses an improved iterative wave function reconstruction method for recovering the wave function of the lower surface of a sample by using a series of underfocus images, and belongs to the field of transmission electron microscope application technology and image processing. Background technique [0002] With the deepening of material research, techniques such as transmission electron microscopy to characterize the internal microstructure of materials have achieved rapid development. The phase contrast imaging mechanism is the most commonly used imaging method in high-resolution transmission electron microscopy. However, due to the limitations of various aberrations on the TEM objective lens, high-resolution images are difficult to interpret. The image wave function reconstruction technology of the underfocus series is an important image post-processing method, which can remove the influence of various aberrations of the transmission...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G06T7/32G06T7/30
CPCG06T2207/10061G06T7/30G06T7/32
Inventor 陈江华明文全伍翠兰
Owner HUNAN UNIV
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