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Improved under-focus series iterative wave function reconstruction method

A wave function, a series of technologies, applied in the field of transmission electron microscope application technology and image processing, to achieve the effect of eliminating errors, reducing images, improving success rate and signal-to-noise ratio

Active Publication Date: 2019-08-13
HUNAN UNIV
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  • Application Information

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Problems solved by technology

These methods all have large errors when the step size of the underfocus of two adjacent images in the series is large

Method used

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  • Improved under-focus series iterative wave function reconstruction method
  • Improved under-focus series iterative wave function reconstruction method
  • Improved under-focus series iterative wave function reconstruction method

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Embodiment Construction

[0055] The present invention will be further described in detail through a specific embodiment. The following examples are used to illustrate the present invention, but the specific embodiments of the present invention are not limited to the following examples.

[0056] The transmission sample used in the present embodiment is 2000 series aluminum alloy, and the transmission electron microscope used is FEI Tecnai F20, and the incident direction of electron beam is [001] Al .

[0057] S1: Perform conventional centering operations on the electron microscope, and make the electron beam incident along the [001] direction of the aluminum substrate of the sample, with a magnification of about 590,000 times, and record a set of (N sheets) under the condition of -229.3nm underfocus , N=20) and other low-focus series high-resolution images of the under-focus step length, the number of pixels of the image is 1024*1024, and the under-focus step size is -4.77nm, such as figure 2 shown....

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Abstract

The invention discloses an improved iterative wave function reconstruction method for recovering a surface wave function under a sample by utilizing an under-focus series high-resolution image. The method is established on the basis of a traditional iterative wave function reconstruction method and a method for electron waves to propagate in vacuum. According to the method, an initial wave function reconstructed from two images is propagated to the next under-focus plane, so that a reconstructed high-resolution image at the plane can be obtained. By comparing the reconstructed image with the image recorded by the experiment, the method can effectively eliminate the difference of image contrast introduced by the under-focus difference, thereby solving the relative drift between the two images and the registered image. Through continuous iteration of the above method, an image with accurate registration can be obtained, and a final wave function can be obtained. According to the method,the problem that the under-focus series images cannot be accurately registered for a long time is solved, and a foundation is established for quantitative analysis of high-resolution images.

Description

technical field [0001] The invention discloses an improved iterative wave function reconstruction method for recovering the wave function of the lower surface of a sample by using a series of underfocus images, and belongs to the field of transmission electron microscope application technology and image processing. Background technique [0002] With the deepening of material research, techniques such as transmission electron microscopy to characterize the internal microstructure of materials have achieved rapid development. The phase contrast imaging mechanism is the most commonly used imaging method in high-resolution transmission electron microscopy. However, due to the limitations of various aberrations on the TEM objective lens, high-resolution images are difficult to interpret. The image wave function reconstruction technology of the underfocus series is an important image post-processing method, which can remove the influence of various aberrations of the transmission...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06T7/32G06T7/30
CPCG06T2207/10061G06T7/30G06T7/32
Inventor 陈江华明文全伍翠兰
Owner HUNAN UNIV
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