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Biconical aerostatic rotary table

A gas static pressure, biconical technology, applied in the direction of workbench, manufacturing tools, etc., can solve the problems of high turntable height and large turntable quality, and achieve the effect of low overall height, low mass of rotating body, and high rotation accuracy.

Inactive Publication Date: 2019-08-16
ZHONGYUAN ENGINEERING COLLEGE
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The invention proposes a biconical gas static pressure turntable, which solves the problems of high mass and high turntable height in the prior art

Method used

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  • Biconical aerostatic rotary table
  • Biconical aerostatic rotary table

Examples

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Embodiment

[0023] Example: such as Figures 1 to 2 As shown, a double-cone gas static pressure turntable includes a turntable table top 1, a torque motor rotor mounting shaft 6 fixedly connected to the turntable table top 1 through the second screw 5 and the fifth screw 10, and the first screw 4 and the seventh screw. The screw 12 is sleeved on the torque motor rotor 13 connected to the outside of the torque motor rotor installation shaft 6, and the torque motor stator 19 is sleeved on the outside of the torque motor rotor 13, and also includes an air bearing connection assembly, an angular displacement measurement assembly and a turntable base 27. The air flotation connection assembly includes an upper static pressure block 25, a static pressure block bonding seat 26, a lower static pressure block 24 and a gas pipe joint 28, and the angular displacement measurement assembly includes a lower static pressure plate 2, a circular grating 7, a reading head installation Seat 17 and reading he...

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Abstract

The invention provides a biconical aerostatic rotary table. The biconical aerostatic rotary table comprises a rotary table board, a torque motor rotor mounting shaft connected with the rotary table board, a torque motor rotor connected to the outer side of the torque motor rotor mounting shaft in a sleeving manner and a torque motor stator arranged on the outer side of the torque motor rotor in asleeving manner. The biconical aerostatic rotary table further comprises an air flotation connecting assembly, an angle displacement measurement assembly and a rotary table base. The air flotation connecting assembly is located between the rotary table board and the angle displacement measurement assembly and is connected with an external air source. The air flotation connecting assembly is connected to the torque motor stator in a sleeving manner and is connected with the rotary table base. The angle displacement measurement assembly is located in the rotary table base, the upper portion of the angle displacement measurement assembly is connected with the torque motor rotor mounting shaft, and the lower portion of the angle displacement measurement assembly is connected with the rotary table base. The biconical aerostatic rotary table has the advantages of being small in overall height and small in rotating body mass, and the requirements for rotating precision and locating precisionare met.

Description

technical field [0001] The invention belongs to the technical field of ultra-precision measurement and processing, and in particular relates to a biconical gas static pressure turntable. Background technique [0002] The gas static pressure turntable is the core unit component in the shape and position error measurement of shaft and disk parts in the modern machinery manufacturing industry and the processing technology of planar parts in the semiconductor industry. High rotation accuracy, positioning accuracy and acceleration and deceleration are its core technical requirements. [0003] In order to achieve the above technical requirements, it is necessary to strictly control the quality of the rotating parts and reduce the overall height of the turntable. Contents of the invention [0004] The invention provides a biconical gas static pressure turntable, which solves the problems of high mass and high turntable height in the prior art. [0005] In order to solve the abov...

Claims

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Application Information

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IPC IPC(8): B25H1/14
CPCB25H1/14
Inventor 李彬席建普吴媛媛赵则祥任东旭王东强王晓林焦振起闫秀娟刘天禹
Owner ZHONGYUAN ENGINEERING COLLEGE
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