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An on-chip terahertz sensing-enhanced device based on metasurface and lithium niobate hybrid structure

A hybrid structure and sensing device technology, applied in the field of terahertz characteristic absorption spectrum detection, can solve the problems of urgent demand for terahertz sensors, small detection material scale, weak detection signal strength, etc., and achieve strong electric field enhancement, low cost, and absorption peak significant effect

Active Publication Date: 2021-12-24
NANKAI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, there is relatively little research on detection devices in the terahertz frequency band in China. Due to the limitations of factors such as the small scale of the detection material and the weak detection signal strength, there is an urgent need for effective terahertz sensors.

Method used

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  • An on-chip terahertz sensing-enhanced device based on metasurface and lithium niobate hybrid structure
  • An on-chip terahertz sensing-enhanced device based on metasurface and lithium niobate hybrid structure
  • An on-chip terahertz sensing-enhanced device based on metasurface and lithium niobate hybrid structure

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Embodiment

[0055] A device based on a terahertz integrated platform that can localize energy to the surface of a hybrid structure based on a metal antenna array to achieve enhanced terahertz sensing.

[0056] The specific implementation steps are as follows:

[0057] (1) Numerical calculation is used to simulate the formant of antennas with different lengths;

[0058] (2) Coating a 2 μm thick low-refractive index silicon dioxide layer on the surface of the 50 μm thick subwavelength lithium niobate waveguide to increase the resonant frequency of the antenna, wherein the optical axis of the lithium niobate crystal is along the x direction;

[0059] (3) Using ultraviolet lithography technology and magnetron sputtering technology to deposit metal antenna arrays on the surface of lithium niobate coated with 2 μm thick silicon dioxide, and fabricate on-chip terahertz sensing enhancement devices;

[0060] (4) Treatment of the medicines used in the experiment, taking lactose as an example. Dur...

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Abstract

The invention discloses an on-chip terahertz sensing enhancement device based on a supersurface and lithium niobate hybrid structure. Its purpose is to perform high-sensitivity detection of trace biochemical substances. By adjusting the length of the metal antenna and the thickness of the silicon dioxide dielectric layer, the detection of different drugs in a wider frequency range is realized. The approach used is to plate the antenna array metasurface on the surface of a subwavelength lithium niobate waveguide deposited with a silicon dioxide layer, and then apply a thin layer of chemicals on top of the metasurface. By exciting the local surface plasmon of the antenna, the absorption of light in the characteristic frequency band by the substance is enhanced, and the highly sensitive detection of the substance is realized. The invention solves the problem of weak signal due to the small volume of the sample and weak interaction with the light field. The invention has the remarkable characteristics of simple device, small volume, many types of measurements, high sensitivity, and easy manipulation, and is widely applicable to the sensing and detection of terahertz characteristic spectra of trace substances in fields such as biochemistry and medicine.

Description

technical field [0001] The invention relates to an on-chip terahertz sensing enhancement device, which is especially suitable for detecting the terahertz characteristic absorption spectrum of trace biochemical drugs. Background technique [0002] The terahertz wave band (0.1THz to 10THz) is an electromagnetic wave band between microwave and infrared, and has many excellent properties, such as: terahertz wave has strong penetrability; photon energy is low (4meV / THz), and it will not cause damage to biological tissues. Photoionization damage; many biological macromolecules and chemicals have obvious characteristic absorption peaks in the terahertz band. Therefore, the use of terahertz characteristic spectrum to detect biochemical and drug macromolecules can be widely used in the fields of biomedicine and sensor detection. At present, there are relatively few domestic studies on detection devices in the terahertz frequency band. Due to the limitations of factors such as the sm...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/3586
CPCG01N21/3586
Inventor 吴强王日德张亚卿徐西坦张斌姚江宏许京军
Owner NANKAI UNIV
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