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A method and system for releasing machine programs

A release machine and program technology, applied in the manufacture of electrical components, circuits, semiconductors/solid-state devices, etc., can solve the problems of reducing production efficiency and accuracy

Active Publication Date: 2021-04-09
ZHENGZHOU UNIV OF IND TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This manual processing method greatly reduces production efficiency and accuracy

Method used

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  • A method and system for releasing machine programs
  • A method and system for releasing machine programs
  • A method and system for releasing machine programs

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Embodiment Construction

[0027] In order to make the purpose, features and effects of the present invention more obvious and understandable, the specific implementation manners of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0028] Many specific details are set forth in the following description to facilitate a full understanding of the present invention, but the present invention can also be implemented in other ways than described here, so the present invention is not limited by the specific embodiments disclosed below.

[0029] This application firstly provides a method for releasing machine programs, such as figure 1 shown, including:

[0030] In step S10, the process engineer writes all the programs of the test machine, the test items required to release each program, and the one-to-one corresponding arrangement of each program and the test items required to release the program into the MES system.

[0031]In step S11, the process engin...

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Abstract

The invention relates to a method and system for releasing machine programs. The method includes: determining the program for processing the control sheet of the machine and the required test items to form a process flow of the control sheet according to the condition of the machine; correspondingly arranging all the programs of the machine and the test items required for releasing each program; Execute the process according to the control process flow, measure the test items of the control film after the machine measures the processing, compare the measured value of the test item with the standard value, and record the comparison result; if all the test items corresponding to the program are qualified, release Corresponding programs that pass all test items are arranged correspondingly. The invention can control the release of programs more effectively.

Description

technical field [0001] The invention relates to the field of semiconductors, in particular to a method and system for releasing machine programs. Background technique [0002] With the development of semiconductor technology, semiconductor companies will use software control systems to maximize the production capacity of semiconductor production equipment. The core of this series of control systems is the Manufacturing Execution System (Manufacturing Execution System, MES) and the EAP system (Equipment Automation Programming, EAP). MES uses a powerful data collection engine and integrated data collection channels to cover the entire factory manufacturing site to ensure real-time, accurate and comprehensive collection of on-site data. MES records all information about machines and chips on the production line. [0003] The EAP system has at least the following functions and features: [0004] 1. Integrate with MES system, automatically verify product production information,...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67
CPCH01L21/67242H01L21/67276
Inventor 欧阳富
Owner ZHENGZHOU UNIV OF IND TECH