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Cyclic scanning exposure machine

A scanning exposure and cyclic technology, applied in the field of cyclic scanning exposure machines, can solve problems such as low exposure efficiency of workpiece exposure equipment

Pending Publication Date: 2019-09-27
CAIZ OPTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to solve the problem of low exposure efficiency of workpiece exposure equipment in the prior art

Method used

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  • Cyclic scanning exposure machine
  • Cyclic scanning exposure machine
  • Cyclic scanning exposure machine

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Experimental program
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Embodiment Construction

[0019] The structure of the present invention will be further described below in conjunction with the accompanying drawings.

[0020] refer to Figure 1 to Figure 5 , a circular scanning exposure machine includes a base 1, an exposure table 2 arranged on the base, and an exposure device 3 for exposing a workpiece 8, and two groups of left feeders for workpiece feeding are respectively arranged on the exposure table Mechanism 4 and right feeding mechanism 5, left feeding mechanism and right feeding mechanism divide exposure table into left exposure area and right exposure area, left feeding mechanism and right feeding mechanism all include to be used for supporting and placing workpiece by a plurality of A support column assembly 41 composed of inverted U-shaped support columns arranged parallel to each other, and a transfer plate 42 for lifting and transmitting workpieces on the support column assembly. The transfer plate is provided with a top column assembly 421 that coopera...

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Abstract

The invention discloses a cyclic scanning exposure machine, which relates to the field of optical equipment and solves the problem of low exposure efficiency of the existing workpiece exposure equipment. The cyclic scanning exposure machine comprises a base, an exposure table disposed on the base and an exposure device, wherein the exposure table is respectively provided with two sets of left feeding mechanisms and right feeding mechanisms for workpiece feeding respectively; the exposure device support is provided with an exposure device driving mechanism for driving more than one row of exposure devices to move; the base is provided with an exposure device support driving mechanism for driving the exposure device support to move vertically to the exposure device support; the left feeding mechanism and the right feeding mechanism can support the workpiece at the same time ready for exposure; when a left workpiece completes exposure, the exposure device moves to a right workpiece for direct exposure, the left feeding mechanism transmits the exposed workpiece out and transmits and supports an unexposed workpiece on a left supporting column assembly for exposure, and the process is cycled sequentially; a sensor is used for detecting whether the workpiece is bent, and unqualified workpieces are thus eliminated; and the exposure efficiency is high, and feeding waiting time is not needed.

Description

technical field [0001] The invention relates to the field of optical equipment, in particular to a circular scanning exposure machine. Background technique [0002] In the existing exposure scanning method, the workpiece is usually placed on the exposure table, and then the exposure operation is performed. In the way of exchanging workpieces, the other workpiece can only be moved in after the previous workpiece is removed. Contents of the invention [0003] The purpose of the present invention is to solve the problem of low exposure efficiency of workpiece exposure equipment in the prior art. [0004] The technical solution adopted to solve the technical problems proposed by the present invention is: the circular scanning exposure machine of the present invention includes a base, an exposure table arranged on the base, and an exposure device for workpiece exposure. There are two groups of left feeding mechanism and right feeding mechanism for workpiece feeding respectivel...

Claims

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Application Information

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IPC IPC(8): G03F7/20
CPCG03F7/2051G03F7/70366
Inventor 蔡志国张米好江俊龙农远峰
Owner CAIZ OPTRONICS CORP