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A splicable infrared micro-bridge structure resistance matrix

A resistance matrix and micro-bridge structure technology, which is applied to circuits, electrical components, and electrical solid devices, can solve the problems of low duty cycle, high cost, and the inability of large-scale infrared scene generators to achieve low manufacturing costs. , The effect of simple preparation process

Active Publication Date: 2022-03-15
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to provide a splicable infrared micro-bridge structure resistance matrix to solve the problems that the existing infrared scene generator cannot be made into a large area, the duty ratio is low, and the cost is expensive.

Method used

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  • A splicable infrared micro-bridge structure resistance matrix
  • A splicable infrared micro-bridge structure resistance matrix
  • A splicable infrared micro-bridge structure resistance matrix

Examples

Experimental program
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Effect test

Embodiment 1

[0029] This embodiment provides an infrared micro-bridge structure resistance matrix that can be spliced ​​with a high duty cycle, and its structure is as follows Figure 1 ~ Figure 3 As shown, it includes: a carrier 1-1, an IC driver 1-4 and several microbridge resistance matrix units; the IC driver 1-4 is arranged on the lower surface of the carrier 1-1; the several microbridge resistance matrix units are The matrix is ​​arranged on the upper surface of the carrier 1-1, and each micro-bridge resistance matrix unit is suspended and fixed on the upper surface of the carrier 1-1 through the metal lead-out line 1-2; the micro-bridge resistance matrix units are sequentially stacked from bottom to top The dielectric film 1-5, the resistive film 1-3 and the metal electrode 1-6 are formed, and the metal electrode 1-6 maintains electrical conduction with the carrier 1-1 through the metal lead-out line 1-2; the infrared microbridge structure The resistance matrix is ​​driven by a digi...

Embodiment 2

[0039] This embodiment provides a microbridge structure resistance matrix that can be spliced ​​with infrared flip chip, and its structure is as follows Figure 4 ~ Figure 5 As shown, it includes: a carrier 2-1, an IC driver 2-4 and several microbridge resistance matrix units; the IC driver 2-4 is arranged on the lower surface of the carrier 2-1; the several microbridge resistance matrix units are The matrix is ​​arranged on the upper surface of the carrier 2-1; each microbridge resistance matrix unit is supported by a bridge body support beam 2-5, a resistance film 2-3, and a metal film 2-2, and the microbridge resistance matrix unit is supported by the bridge body The beam is fixed on the upper surface of the carrier 2-1, the resistive film 2-3 is arranged on the upper surface of the bridge body support beam 2-5, and the metal film 2-2 covers both sides of the bridge body support beam 2-5, The resistance film 2-3 maintains electrical conduction with the carrier 2-1 through t...

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Abstract

The invention belongs to the field of infrared dynamic scene simulation, and specifically provides an infrared micro-bridge structure resistance matrix and a preparation method thereof. The invention uses a micro-bridge structure resistance and an IC drive on the basis of the mini-LED process and the flip-chip mini-LED process. Prepared a micro-bridge structure resistance matrix with a carrier, realized a large-scale micro-bridge structure resistance array, the scale of which is not less than 640×640, and the preparation process is simple and the preparation cost is low; it effectively solves the problem that the existing infrared scene generator cannot be made into a large Issues such as area, low duty cycle and high cost.

Description

technical field [0001] The invention belongs to the field of infrared dynamic scene simulation, and relates to a resistance array infrared scene generator, in particular to a resistance array of a micro-bridge structure, specifically a resistance matrix of an infrared micro-bridge structure. Background technique [0002] With the development of science and technology, infrared systems are widely used in national defense and civilian fields; as a typical test system, the dynamic infrared scene simulation system can test the dynamics of thermal imaging cameras, missile seekers and various infrared detection systems. Performance testing and evaluation. Therefore, infrared simulation technology is the key to reducing the development cost of weapon systems, shortening the development cycle, and improving the cost-effectiveness ratio. [0003] The core device of the dynamic infrared scene simulation system is the infrared scene generator, which is commonly called an infrared targ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L27/146
CPCH01L27/14603H01L27/14634H01L27/1469
Inventor 王继岷蒋向东白家铭曾一雄郭瑞康张亚楠
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA