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Vibrating element, method of manufacturing vibrating element, physical quantity sensor, inertial measurement device, electronic apparatus, and moving body

A technology of physical quantity sensor and vibrating element, which is applied in the field of mobile objects, can solve the problems of rising manufacturing cost, falling manufacturing efficiency, and increasing the number of manufacturing processes

Inactive Publication Date: 2019-10-11
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the number of manufacturing steps increases, leading to a decrease in manufacturing efficiency and an increase in manufacturing cost

Method used

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  • Vibrating element, method of manufacturing vibrating element, physical quantity sensor, inertial measurement device, electronic apparatus, and moving body
  • Vibrating element, method of manufacturing vibrating element, physical quantity sensor, inertial measurement device, electronic apparatus, and moving body
  • Vibrating element, method of manufacturing vibrating element, physical quantity sensor, inertial measurement device, electronic apparatus, and moving body

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Experimental program
Comparison scheme
Effect test

no. 1 Embodiment approach

[0038] First, the resonator element and its manufacturing method of the first embodiment will be described.

[0039] (Vibration element)

[0040] figure 1 It is a plan view showing the resonator element of the first embodiment of the present invention. figure 2 Is along figure 1 A cross-sectional view of line A-A in. image 3 It is an enlarged plan view showing the vicinity of the weight portion of the vibrating arm (driving arm) of the vibrating element. Figure 4 Is along image 3 A cross-sectional view of line B-B in. Figure 5 Is along image 3 Sectional view of line C-C in. In each figure, the size of each part is shown appropriately exaggerated as necessary, and the size ratio between each part does not necessarily coincide with the actual size ratio. The position, direction, and size of each part described below also include the range of manufacturing errors. For example, the difference is within ±1%. As long as the necessary function of each part can be realized, it is not...

no. 2 Embodiment approach

[0134] Picture 12 It is a plan view showing the resonator element of the second embodiment of the present invention.

[0135] Hereinafter, the second embodiment will be described, but the description will be focused on differences from the above-mentioned embodiment, and description of the same matters will be omitted. In addition, in Picture 12 Here, the same reference numerals are given to the same structures as in the above-mentioned embodiment.

[0136] This embodiment is the same as the above-mentioned first embodiment except that the present invention is applied to a so-called H-type resonator element.

[0137] Picture 12 The vibration element 1D shown is a sensor element that detects the angular velocity around the y-axis. This vibrating element 1D has a vibrating piece 2D, an electrode film (not shown) and a weighting film 3D provided on the vibrating piece 2D.

[0138] The vibrating piece 2D has a base 21D, a pair of drive arms 24D, 25D, and a pair of detection arms 22D, ...

no. 3 Embodiment approach

[0147] Figure 13 It is a plan view showing the resonator element of the third embodiment of the present invention.

[0148] Hereinafter, the third embodiment will be described, but the description will focus on the differences from the above-mentioned embodiment, and description of the same matters will be omitted. In addition, in Figure 13 Here, the same reference numerals are given to the same structures as in the above-mentioned embodiment.

[0149] This embodiment is the same as the above-mentioned first embodiment except that the present invention is applied to a so-called two-leg tuning-fork type resonator element.

[0150] Figure 13 The vibration element 1E shown is a sensor element that detects the angular velocity around the y-axis. This vibrating element 1E has a vibrating piece 2E, an electrode film (not shown) and weighting films 33E and 34E provided on the vibrating piece 2E.

[0151] The vibrating piece 2E has a base 21E and a pair of vibrating arms 24E and 25E, whic...

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Abstract

A vibrating element, a method of manufacturing a vibrating element, a physical quantity sensor, an inertial measurement device, an electronic apparatus, and a moving body are provided. The vibrating element includes a base; a vibrating arm extending from the base, and having an arm section provided with an electrode film, and a weight section; and a weight film provided to the weight section. Thevibrating arm has a first principal surface and a second principal surface in an obverse-reverse relationship, the electrode film and the weight film are disposed on the first principal surface and the second principal surface, and a thickness of the electrode film disposed on the first principal surface, a thickness of the weight film disposed on the first principal surface, a thickness of the electrode film disposed on the second principal surface, and a thickness of the weight film disposed on the second principal surface are each no less than 50 nm and no more than 500 nm.

Description

Technical field [0001] The present invention relates to a vibrating element, a method of manufacturing a vibrating element, a physical quantity sensor, an inertial measurement device, an electronic device, and a moving body. Background technique [0002] Conventionally, there have been known vibrating elements used in devices such as quartz vibrators and vibratory gyroscope sensors. The tuning-fork-type quartz vibrating piece described in Patent Document 1 as an example of such a vibrating element has a base and a pair of vibrating arms that are divided into two and extend in parallel from the base. Here, excitation electrodes and weight portions are formed on the front and back of the vibrating arm. In addition, by inputting a drive voltage to the excitation electrode, the vibrating arm can generate an electric field and vibrate. [0003] In addition, in the tuning-fork-type quartz vibrating piece described in Patent Document 1, excitation electrodes are provided on the entire f...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/04H01L41/09H01L41/113H01L41/253G01C21/16G01C19/5628G01C19/5621
CPCG01C19/5621G01C19/5628G01C21/16H10N30/80H10N30/2042H10N30/306H10N30/302H10N30/04G01C19/5769
Inventor 佐佐木奖悟志村匡史山口启一押尾政宏
Owner SEIKO EPSON CORP