Control method for reducing coupling of X axis and Y axis in two-axis rapid reflector

A control method and reflector technology, applied in installation, optics, instruments, etc., can solve the problems of reducing X-axis and Y-axis coupling, without increasing processing and assembly requirements, and achieving the effect of improving stability

Active Publication Date: 2019-10-22
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0013] For the fast two-axis mirror supported by a flexible structure mentioned in the above background, due to the deformation of the flexible support structure itself, the non-perpendicularity of the two rotation axes caused by manufacturing, and the non-collinearity between the installation position of the actuator and the rotation axis The X-axis and Y-axis mutual coupling problems caused by the deviation of the measurement element and the non-collinear factors of the installation position of the measuring element and the rotation axis, the present invention proposes a control method that can significantly reduce the coupling of the X-axis and Y-axis in the two-axis fast mirror , without improving the processing and assembly requirements, the coupling degree of the X-axis and Y-axis is reduced from more than 2% to less than 0.1%, which effectively improves the control stability and interference immunity of the X-axis and Y-axis in the mirror system Capability and Positioning Accuracy

Method used

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  • Control method for reducing coupling of X axis and Y axis in two-axis rapid reflector
  • Control method for reducing coupling of X axis and Y axis in two-axis rapid reflector
  • Control method for reducing coupling of X axis and Y axis in two-axis rapid reflector

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Embodiment Construction

[0042] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0043] Such as figure 1 As shown, a two-axis fast mirror includes a mirror 1, a mirror base 2, a flexible support structure 3, an actuator 4 and a base 6;

[0044] The mirror 1 (the plane of the mirror has two virtual X-axis and Y-axis) is installed on the mirror base 2, and the flexible support structure 3 and the actuator 4 are installed between the mirror base 2 and the base 6, and the mirror base 2 and the base Two actuators 4 are installed symmetrically along the X-axis direction between 6, and two actuators 4 are installed symmetrically along the Y-axis direction at the same time, and a micro-displacement measuring element 5 is respectively installed in the X-axis direction and the Y-axis direction; the controller 7 pairs Two-axis fast mirrors are controlled.

[0045] Step [1] When the Y-axis is in a free state, apply a control signal t...

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Abstract

The invention discloses a control method for reducing coupling of an X axis and a Y axis in a two-axis rapid reflector. The control method reduces the coupling degree of the X axis and the Y axis from2% or more to less than 0.1% without improving the processing and assembly requirements, and effectively improves control stability, interference resistance and positioning precision of the X axis and the Y axis in a reflector system. The control method comprises the steps of: [1] acquiring transfer functions Gx, Gy and coupled transfer functions Gxy, Gyx; [2] adopting MATALB software to design correction transfer functions Gxc, Gyc satisfying index requirements; [3] designing compensation transfer functions Gxyc, Gyxc; [4] establishing an analog / digital controller; [5] and utilizing the analog / digital controller to control the analog / digital controller.

Description

technical field [0001] The invention relates to a control method for reducing two-axis coupling, in particular to a control method for reducing X-axis and Y-axis coupling in a two-axis fast mirror. Background technique [0002] With the continuous development of high-precision technology, especially the development and demand of astronomical exploration, medical and industrial fields, the precise pointing, phase shift compensation, tracking and stabilization of beams have received extensive attention and a lot of research. Among them, beam stabilization technology is one of the core technologies in the research of laser processing, space laser communication, and large-aperture astronomical telescopes. [0003] The fast mirror adopts a flexible structure different from the traditional shaft system, and uses a voice coil motor or piezoelectric ceramic with high bandwidth response and nanoscale displacement response resolution as the actuator; secondly, a high-precision micro-d...

Claims

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Application Information

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IPC IPC(8): G02B7/182G02B26/08G02B7/198
CPCG02B7/1821G02B26/0816
Inventor 苏秀琴王瑞吕涛乔永明杨露露贺丽琳
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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