Control method for reducing coupling of X axis and Y axis in two-axis rapid reflector
A control method and reflector technology, applied in installation, optics, instruments, etc., can solve the problems of reducing X-axis and Y-axis coupling, without increasing processing and assembly requirements, and achieving the effect of improving stability
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[0042] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0043] Such as figure 1 As shown, a two-axis fast mirror includes a mirror 1, a mirror base 2, a flexible support structure 3, an actuator 4 and a base 6;
[0044] The mirror 1 (the plane of the mirror has two virtual X-axis and Y-axis) is installed on the mirror base 2, and the flexible support structure 3 and the actuator 4 are installed between the mirror base 2 and the base 6, and the mirror base 2 and the base Two actuators 4 are installed symmetrically along the X-axis direction between 6, and two actuators 4 are installed symmetrically along the Y-axis direction at the same time, and a micro-displacement measuring element 5 is respectively installed in the X-axis direction and the Y-axis direction; the controller 7 pairs Two-axis fast mirrors are controlled.
[0045] Step [1] When the Y-axis is in a free state, apply a control signal t...
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