Light source of exposure machine
A technology of exposure machine and light source, which is applied in the fields of optomechanical equipment, microlithography exposure equipment, photolithography process exposure device, etc., and can solve the problem that high precision and high resolution cannot be satisfied.
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[0031] The present invention will be further described below in conjunction with accompanying drawing:
[0032] Such as figure 1 As shown in , a light source of an exposure machine is sequentially provided with a light source 1, a parallel light component 2, and an optical path correction component 3;
[0033] The light path of the light source 1 passes through the parallel light component 2 and the light path correction component 3 in sequence; after the light from the light source 1 passes through the parallel light component 2, a parallel light path is formed, and then the light path is corrected by the light path correction component 3;
[0034] The optical path direction of the parallel light assembly 2 is parallel to the central axis of the light transmission part 30 of the optical path correction assembly 3, and the parallel light assembly 2 is used to regularize the optical path of the light source so as to form a quasi-parallel optical path; so that the light can be b...
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