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Inspection method of nickel film irradiated with laser

An inspection method and irradiated technology, applied in laser welding equipment, color/spectral characteristic measurement, manufacturing tools, etc., can solve the problem that conductor parts cannot be used in products, etc.

Active Publication Date: 2022-03-04
DENSO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, since the nickel film needs to be wetted with water, the inspected conductor parts cannot be used in products

Method used

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  • Inspection method of nickel film irradiated with laser
  • Inspection method of nickel film irradiated with laser
  • Inspection method of nickel film irradiated with laser

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] (Example 1) with reference to Figure 3-Figure 9 A method of inspecting the nickel film 12 irradiated with laser light in Example 1 will be described. here, in Image 6 , Figure 8 In , the average value obtained by repeating the color measurement of the nickel film 12 30 times is plotted. like Figure 9 As shown, the inspection method includes a reduction step S12. In the reducing step S12, the surface 12a of the nickel film 12 is reduced in a reducing gas atmosphere. As a result, oxides on the nickel film 12 formed in the previous laser irradiation step are removed. The specific form of reduction process S12 is not specifically limited. like image 3 As shown, in this embodiment, the conductor member 10 on which the nickel film 12 is formed is placed in the chamber 16 , and a reducing gas is introduced into the chamber 16 . Reducing gases such as hydrogen (H 2 ). However, the reducing gas is not limited to hydrogen, carbon monoxide (CO), hydrogen sulfide (H ...

Embodiment 2

[0036] (Example 2) The inspection method of the nickel film 12 irradiated with the laser beam of Example 2 is demonstrated. The inspection method of Example 2 differs from Example 1 in the following points. First, in the color measurement step S16 , color measurement including at least an index indicating a blue component is performed on the surface 12 a of the nickel film 12 . In addition, in the first judging step S18, the state of the surface 12a of the nickel film 12, for example, the processing state of the nickel film 12 formed by laser irradiation is judged based on the index indicating the blue component. Since the other steps are the same as in Example 1, description thereof will be omitted.

[0037] In the color measurement step S16 of the present embodiment, after the heating step S14, the color measurement of the surface 12a of the nickel film 12 is performed. Although described above, in the color measurement step S16 , color measurement including at least an in...

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Abstract

This specification discloses a method of inspecting a nickel film irradiated with laser light. The inspection method includes: a reduction step of reducing the surface of the nickel film irradiated with laser light in a reducing gas atmosphere; a heating step of heating the surface of the nickel film to 250° C. or higher in a nitrogen atmosphere after the reduction step; a color measurement process, after the heating process, color measurement is performed on the surface of the nickel film; and a judgment process, based on the color measurement result in the color measurement process, the state of the surface of the nickel film is judged.

Description

technical field [0001] The technique disclosed in this specification relates to an inspection method of a nickel film irradiated with laser light. Background technique [0002] A method of manufacturing a semiconductor device is disclosed in Japanese Patent Application Laid-Open No. 2017-191807. This method of manufacturing a semiconductor device includes a step of irradiating a nickel film provided on a conductor member with laser light. In the step of irradiating the laser beam, minute unevenness is formed on the nickel film of the conductor member. According to the anchoring effect, the fine concavo-convex shape of the nickel film improves the adhesion between the conductor member and the sealing material in contact with the conductor member. [0003] When irradiating a nickel film with laser light, it is necessary to set processing parameters appropriately. If the processing parameters such as laser power and irradiation time are not appropriate, fine unevenness canno...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/25
CPCG01N21/25H01L23/3142B23K26/352H01L23/29H01L23/31B23K26/08H01L21/02365H01L21/67115B23K26/0006H01L21/268
Inventor 中岛佐知子福西笃志
Owner DENSO CORP