A compact two-dimensional micro-nano servo platform

Abstract

The invention provides a compact two-dimensional micro-nano servo platform, which includes a base and a displacement amplification mechanism. The base is provided with a cross slot, and two adjacent slots of the slot extend outward to form a Long slot, the micro-motion platform is installed in the center of the slot in a square shape, and two displacement amplification mechanisms are respectively installed in the long slot to realize the displacement drive in the X-axis direction and the Y-axis direction respectively; each displacement amplification mechanism is correspondingly set There are a main guiding mechanism, a secondary guiding mechanism and a displacement sensor; the main guiding mechanism and the secondary guiding mechanism are installed in the slot and arranged on opposite sides of the micro-movement platform, and the main guiding mechanism is located between the micro-moving platform and the displacement amplification mechanism , the main guiding mechanism is connected with the displacement amplification mechanism through a flexible hinge, and the end face of the micro-motion platform is connected with the main guiding mechanism and the secondary guiding mechanism through a flexible hinge. The servo platform has the advantages of compact structure, high displacement magnification, no friction and wear, no lubrication, and high utilization rate of base materials.

Description

technical field [0001] The invention mainly relates to the technical field of micro-nano processing, in particular to a compact two-dimensional micro-nano servo platform. Background technique [0002] Many branch technologies in nanotechnology, such as manufacturing, inspection, control, and measurement, all rely on the ultra-precise movement of nano-devices. Commonly used nano-drive devices are mostly driven by piezoelectric ceramics, but they have the disadvantages of small motion scale and large influence of parasitic motion. At present, the piezoelectric ceramic actuator with the largest output displacement can only output a displacement of about 0.1% of its own length; at the same time, affected by factors such as the flexible deformation of the piezoelectric material itself and manufacturing and installation errors, the output of the piezoelectric ceramic actuator is often accompanied by harmful parasitic displacement. Existing micro-nano servo platforms mostly adopt...

AI Technical Summary

Problems solved by technology

Commonly used nano-drive devices are mostly driven by piezoelectric ceramics, but they have the disadvantages of small motion scale and large influence of parasitic motion

At present, the piezoelectric ceramic actuator with the largest output displacement can only output a displacement of about 0.1% of its own length; at the same time, affected by factors such as the flexible deformation of the piezoelectric material itself and manufacturing and installation errors, the output of the piezoelectric ceramic actuator is often accompanied by harmful parasitic displacement

Existing micro-nano servo platforms mostly adopt the method of subtractive machining on square base blocks. During this period, there are often disadvantages of low utilization rate of base materials and waste of materials. This is mainly due to the uncompact design of micro-nano servo platforms The small ratio of the slot area to the total area of ​​the base is caused by

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