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A system and method for preparing solid-state nanohole arrays with automatic precise positioning

A nanohole array and precise positioning technology, which is applied in the direction of gaseous chemical plating, the manufacture of microstructure devices, and the process for producing decorative surface effects, etc. It can solve the problems of breaking nano-films, unfavorable equipment widely used, and time-consuming preparation. , to achieve the effect of precise and controllable processing position

Active Publication Date: 2022-05-10
CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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  • Claims
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Problems solved by technology

Among them, the constant voltage source breakdown method has the advantage of fast breakdown speed, but due to the need to preset the breakdown current value, the problems of preparing false nanopores and breaking nanofilms will gradually be eliminated; voltage pulse breakdown method and current pulse breakdown method The method is the current mainstream drilling method, which has the advantages of controllable nanopore diameter and pore shape, but because of its nanopore diameter test and electric pulse interspersed execution, it leads to the shortcomings of inaccurate pore size test and time-consuming preparation; The current breakdown method of the tube and the Z-Score constant voltage source breakdown method are new nanopore preparation methods proposed by the research group recently. The former has the advantage of controllable nanopore position, and the latter has the advantage of controllable nanopore diameter. , but based on the current breakdown method of glass microtubes, the method of using close capacitance to control displacement requires additional equipment and cumbersome procedures such as calculation of off-line capacitance, which is not conducive to the widespread use of this equipment; based on Z-Score constant voltage source shock The piercing method solves the problems of the preset breakdown current value and the existing problems of punching false holes and breaking the film in the constant voltage source electric breakdown method, and can control the drilling accuracy of nanopores within 0.5nm, but it still Researchers are required to explore the parameters of the drilling voltage, and because the duration of the drilling voltage and the drilling voltage are fixed, the drilling accuracy and drilling time are seriously affected

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Embodiment Construction

[0038] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention. Apparently, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention. Additionally, the protection scope of the present invention should not be limited only to the specific experimental methods or specific parameters described below.

[0039] In order to realize the automatic preparation and precise preparation of solid-state nanopores, the system and method for automatic and precise positioning and preparation of solid-state nanopore arrays proposed by the present invention can prepare solid-state nanopores with precise positio...

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Abstract

The invention discloses a system and method for automatically and accurately positioning and preparing a solid-state nanohole array. The entire process of the system for automatically and accurately positioning and preparing a solid-state nanohole array is controlled by an automation system to realize automatic preparation of solid-state nanopores. Solid-state nanopores Array preparation, and then realize solid-state nanopore-related detection applications. The nanopore reaming program adopts PID and other control algorithms to control the changes of the reaming voltage and reaming time, which improves the drilling efficiency and aperture precision; the entire nanopore preparation process adopts an in-situ online method, which is seamless with the later nanopore test Link.

Description

technical field [0001] The invention belongs to the technical field of nanohole processing, and in particular relates to a system and method for automatically and accurately positioning and preparing a solid-state nanohole array. Background technique [0002] With the development of nanoscience and technology, nanopore single-molecule technology has become one of the most powerful tools for applied research in the field of life sciences. Solid-state nanopores have been used by many researchers in DNA sequencing, RNA sequencing, and protein structure testing experiments due to their stable performance and controllable pore size. Most of their preparation materials are two-dimensional thin film materials. The existing solid-state nanopore processing methods mainly include transmission electron microscopy processing, focused ion beam processing, and electrical breakdown processing methods. The former two are due to expensive equipment and harsh laboratory conditions, and the pr...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81C1/00
CPCB81C1/00087
Inventor 方绍熙王德强殷博华何石轩谢婉谊周大明王赟姣唐鹏石彪梁丽媛王亮周硕
Owner CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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