A temperature adaptive compensation method for laser displacement sensor

Abstract

The invention discloses a temperature self-adaptive compensation method for a laser displacement sensor, and the method comprises the following steps of respectively testing the output displacement values of the laser displacement sensor at different temperatures under different distance conditions; obtaining temperature characteristic parameter values of a displacement-temperature change curve ofthe laser displacement sensor under different distance conditions through polynomial fitting; performing polynomial fitting on the temperature characteristic parameter values at different distances to obtain calculation coefficients of the temperature characteristic parameters of the laser displacement sensor under different distance conditions; and calculating a temperature characteristic parameter corresponding to an absolute displacement value obtained in the measurement process to obtain a temperature compensation value of the displacement, and compensating the displacement value obtainedby actual measurement by using the temperature compensation value. The temperature self-adaptive compensation method for the laser displacement sensor can adapt to any position in a full range, effectively solves the deviation caused by different temperature coefficients at different distances, and not only has self-adaptive performance, but also greatly improves the temperature compensation precision.

Description

Technical field [0001] The invention relates to a sensor technology, in particular to a temperature adaptive compensation method of a laser displacement sensor. Background technique [0002] The laser displacement sensor is a displacement sensor based on the principle of triangular distance measurement. It has excellent characteristics such as non-contact, high precision, high speed, and absolute measurement, and has become the mainstream measuring instrument in the field of modern industrial measurement. [0003] However, temperature changes have a serious impact on the output of the laser displacement sensor. The temperature characteristics of laser displacement sensors at home and abroad are generally about 0.05%FS / ℃. Take the laser displacement sensor with accuracy ±0.1%FS and range 20mm as an example. If the temperature difference reaches ±10℃, the change in the measured displacement value caused by its temperature is about It is ±0.1mm, and the relative error is about ±0.5%F...

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Problems solved by technology

[0006] Aiming at the problem that the existing laser displacement sensor is sensitive to temperature changes, the present invention proposes a temperature adaptive compensation method for the laser displacement sensor

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