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Unidirectional MEMS microphone and production method thereof

A production method and microphone technology are applied in the field of microphones to achieve the effect of reducing the volume of products

Inactive Publication Date: 2019-11-19
朝阳聚声泰(信丰)科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the existing microphones cannot be completely unidirectionally picked up sound, and it is said that there is noise when using it

Method used

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  • Unidirectional MEMS microphone and production method thereof
  • Unidirectional MEMS microphone and production method thereof
  • Unidirectional MEMS microphone and production method thereof

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Embodiment Construction

[0033] Below in conjunction with accompanying drawing, the embodiment of the present invention is described in detail:

[0034] like Figure 1 to Figure 8 As shown, the present invention discloses a unidirectional MEMS microphone and a production method thereof, which are composed of a PCB upper layer 1, a PCB middle layer 2 and a PCB lower layer 3, and an acoustic cavity is formed after the PCB upper layer 1, PCB middle layer 2 and PCB lower layer 3 are assembled 10. The first sound hole 8 and the second sound hole 9 penetrating through the upper PCB layer 1 are respectively fixed on the upper layer 1 of the PCB. Both are fixed with damping mesh 6, the first acoustic hole 8 is connected to the acoustic cavity 10, the second acoustic hole 9 is connected to the acoustic cavity 10 through the air guide groove 11 provided on the middle layer 2 of the PCB, and the MEMS chip 4 is fixed inside the acoustic cavity 10, MEMS The chip 4 includes an annular silicon base 402 surrounding ...

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Abstract

The invention relates to the field of microphones, in particular to a unidirectional MEMS microphone and a production method thereof. The unidirectional MEMS microphone is composed of a PCB upper layer, a PCB middle layer and a PCB lower layer, wherein the PCB upper layer, the PCB middle layer and the PCB lower layer are assembled to form a sound cavity; a first sound hole and a second sound holewhich penetrate through the PCB upper layer are respectively fixed on the PCB upper layer; damping screen cloth is fixed at the positions, corresponding to the first sound hole and the second sound hole, of the end surface, far away from the PCB lower layer, of the PCB upper layer; the first sound hole is connected with the sound cavity, and the second sound hole is connected with the sound cavitythrough an air guide groove formed in the PCB middle layer, and an MEMS chip is fixed in the sound cavity; and the MEMS chip is connected with an ASIC chip fixed in the sound cavity through a bondingwire. External sound can reach the sound-sensing MEMS chip only through the first sound hole and the second sound hole, and directivity of microphone pickup is completed through the MEMS chip.

Description

【Technical field】 [0001] The invention relates to the field of microphones, in particular to a unidirectional MEMS microphone and a production method thereof. 【Background technique】 [0002] MEMS is a micro-electromechanical system. The full English name is Micro-Electro mechanical System. It refers to a sensor device with a size of a few millimeters or even smaller. Its internal structure is generally on the order of microns or even nanometers. It is an independent intelligent system. To put it simply, MEMS is to miniaturize the mechanical components of traditional sensors, fix the devices on silicon wafers (wafers) through three-dimensional stacking technologies, such as three-dimensional through-silicon vias (TSVs), and finally use special customized sensors according to different applications. Package form, and finally cut and assemble the silicon-based sensor. Benefiting from the cost advantage brought by the mass production of IC silicon wafer processing that cannot b...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H04R19/04
CPCH04R19/04
Inventor 杨国庆仪保发
Owner 朝阳聚声泰(信丰)科技有限公司
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