Ink application apparatus and method for applying ink
A coating device, ink technology, applied in chemical/electrolytic methods to remove conductive materials, printed circuit coatings, patterns and photolithography, etc., can solve problems such as difficult to speed up scanning
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[0042] Below, refer to Figure 1A ~ Figure 3 , the ink application device based on the embodiment will be described.
[0043] Figure 1A It is a schematic diagram of the ink application apparatus based on an Example. On the stage 10 , a table 15 is supported via the XY stage 11 and the θ stage 12 . The object to be coated 50 is supported on the support surface of the table 15 . The object to be coated 50 is, for example, a substrate such as a printed circuit board. For example, the table 15 includes a vacuum chuck mechanism, and the object to be coated 50 is vacuum-adsorbed and fixed on the supporting surface. The supporting surface is, for example, parallel to the horizontal plane and faces upward in the vertical direction.
[0044]The XY stage 11 translates the table 15 relative to the stage 10 in two directions parallel to the supporting surface and perpendicular to each other. The θ stage 12 changes its posture in the rotation direction of the table 15 around the rota...
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