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Substrate support table and substrate preparation device

A support platform and substrate technology, which is applied in the manufacture of semiconductor/solid-state devices, semiconductor devices, electrical components, etc., can solve problems such as uneven temperature, affecting the uniformity of the preparation process, and uneven distribution of plasma, so as to reduce defects and ensure uniformity Sex, the effect of eliminating the gap

Active Publication Date: 2022-04-08
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the gap between the support needle and the substrate will affect the uniformity of the preparation process, which is manifested as uneven temperature during heating and uneven plasma distribution during dry etching, which will cause Mura-like defects on the AMOLED substrate.

Method used

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  • Substrate support table and substrate preparation device
  • Substrate support table and substrate preparation device
  • Substrate support table and substrate preparation device

Examples

Experimental program
Comparison scheme
Effect test

no. 1 example

[0032] figure 2 It is a structural schematic diagram of the substrate supporting platform according to the first embodiment of the present invention. Such as figure 2 As shown, the substrate supporting platform in the embodiment of the present invention includes a platform 10 for placing a substrate. The platform 10 is provided with at least one through hole 11 , and a support pin 13 is slidably connected to the through hole 11 . The supporting needle 13 includes a needle head 131 and a needle body 132 which are oppositely arranged. The needle head 131 is located on the side of the through hole 11 close to the table top 10 , and the surface of the needle head 131 near the table top 10 is not higher than the table top 10 . A gap 14 is provided between the needle head 131 and the needle body 132 . The needle body 132 can slide in the through hole 11 , abut against the side of the needle head 131 away from the table top 10 , and push the needle head 131 out of the through ho...

no. 2 example

[0045] Figure 7 It is a schematic structural view of the supporting pins in the substrate supporting platform according to the second embodiment of the present invention. Such as Figure 7 As shown, this embodiment is an extension of the aforementioned first embodiment. The main structure of the substrate supporting table in this embodiment is the same as that of the aforementioned first embodiment. The difference from the aforementioned first embodiment is that the needle head 131 is away from the side of the table. The connecting piece 15 is provided with a first sawtooth 16 , and the first sawtooth 16 is located on a side of the connecting piece 15 close to the needle body 132 . A side of the needle body 132 close to the needle head 131 is correspondingly provided with a second serration 17 . When the needle body 132 pushes the needle head 131 out, the first sawtooth 16 cooperates with the second sawtooth 17 so that the needle body 132 and the needle head 131 engage with...

no. 3 example

[0048] Based on the technical idea of ​​the aforementioned first embodiment, an embodiment of the present invention further provides a substrate preparation device, including the aforementioned substrate supporting platform. The substrate preparation device of the embodiment of the present invention can reduce the occurrence of mura defects in the substrate.

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PUM

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Abstract

Embodiments of the present invention provide a substrate support table and a substrate preparation device. The substrate support table includes a table top for placing a substrate. The table top is provided with at least one through hole, and support pins are slidably connected to the through hole. The support needle includes a needle head and a needle body arranged oppositely, the needle head is located on the side of the through hole close to the table top, a gap is provided between the needle body and the needle head, and the needle body can hold the The needle head pushes out of the through hole, so that the needle head protrudes from the table; the substrate support table can reduce or eliminate the gap between the substrate and the support needle, thereby reducing the occurrence of mura defects on the substrate.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a substrate support platform and a substrate preparation device. Background technique [0002] AMOLED (Active-matrix organic light-emitting diode, active-matrix organic light-emitting diode) is an active light-emitting device. Compared with the traditional LCD display method, AMOLED display technology does not require a backlight and has self-luminous characteristics. AMOLED uses a very thin film of organic material and a glass substrate. When a current passes through, the organic material will emit light. Therefore, the AMOLED display can significantly save power and energy, and can be made lighter and thinner than the LCD display. A wider range of temperature changes, and the viewing angle becomes larger. AMOLED display is expected to become the next-generation flat-panel display technology after LCD, and it is one of the most concerned technologies in flat-panel display tech...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/687H01L51/56
CPCH01L21/68785H01L21/68742H01L21/68764H10K71/00
Inventor 王文涛史大为赵东升王培杨璐陈兵李铸毅徐海峰王子峰段岑鸿温宵松
Owner BOE TECH GRP CO LTD