Scanning mirror and lidar
A scanning vibrating mirror and lens technology, which is applied in optics, optical components, instruments, etc., can solve the problem that the scanning vibrating mirror cannot take into account the rotation angle and life, and achieve the effects of avoiding life, increasing life, and large rotation angle
Active Publication Date: 2022-08-09
LEISHEN INTELLIGENT SYST CO LTD
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[0037] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0038] It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments of the present invention are only used to explain the relationship between various components under a certain posture (as shown in the accompanying drawings). The relative positional relationship, the motion situation, etc., if the specific posture changes, the directional indication also changes accordingly.
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The present invention relates to the technical field of microelectronic machinery, in particular to a scanning galvanometer and a laser radar. The scanning galvanometer includes a bracket, a lens and a torsion beam. The lens is connected to the bracket through the torsion beam. The torsion beam includes a first straight line segment, a non-linear segment and a second straight line segment that are connected in sequence. The first straight line segment is far from the non-linear segment. One end is connected to the lens, the end of the second straight segment away from the non-linear segment is connected to the bracket, the axes of the first linear segment and the second linear segment are both collinear with the first rotation axis, the lens can rotate around the first rotation axis, and The center of gravity of the non-linear segment is located on the first axis of rotation. By setting the non-linear segment, the actual length of the torsion beam is increased, so as to reduce the rigidity of the torsion beam, so that the lens can obtain a larger rotation angle. However, the length of the torsion beam in the direction of the first rotation axis can be kept unchanged, so as to avoid the torsion beam being subjected to greater torsional force when the lens rotates due to the lengthening of the length in the direction of the first rotation axis.
Description
technical field [0001] The invention relates to the technical field of microelectronic machinery, in particular to a scanning galvanometer and a laser radar. Background technique [0002] Scanning mirrors are often used in lidars, which generate torque through electromagnetic force, causing the mirror to rotate around a torsion beam. The driving methods of the scanning galvanometer can be divided into two types: high-frequency resonant driving and low-frequency quasi-static driving. The high-frequency resonant drive uses the high-gain vibration of the scanning galvanometer in the resonant state, and has the characteristics of high frequency and large angle. However, the high-frequency resonant drive is sensitive to the environment and vibration, and position feedback must be used to control the scanning galvanometer closed-loop, and the high-frequency resonant drive cannot achieve the low-frequency slow-axis scanning necessary for lidar. [0003] Low-frequency quasi-static...
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IPC IPC(8): G02B26/10G01S7/481G01S17/02
CPCG02B26/105G01S7/4817G01S17/02
Inventor 胡小波
Owner LEISHEN INTELLIGENT SYST CO LTD