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Vacuum valve with position sensor

A technology of vacuum valves and sensors, applied in valve devices, sliding valves, mechanical equipment, etc., can solve problems such as cost increase, frequent production stoppages, increased technical and financial investment, and achieve the effect of avoiding maintenance

Active Publication Date: 2022-06-07
VAT HLDG AG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0017] The downside of this type of valve maintenance is its preventive nature
Maintenance-related components are often updated or replaced before their regular or actual useful life expires, which means a dramatic increase in costs
In addition, each such maintenance step usually requires a certain amount of downtime for the production process and requires increased technical and financial investment
All in all, this means that outages occur at shorter intervals than necessary, and outages occur more frequently than fundamentally necessary

Method used

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  • Vacuum valve with position sensor
  • Vacuum valve with position sensor
  • Vacuum valve with position sensor

Examples

Experimental program
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Effect test

Embodiment Construction

[0055] Figure 1a , b schematically show a first embodiment of the vacuum valve 1 according to the invention. In this example, valve 1 is designed as a so-called single valve and is shown in cross section in open position O ( Figure 1a ) and closed position G ( Figure 1b ).

[0056] The valve 1 for closing the flow path airtight by means of a linear movement has a valve housing 24 with an opening 2 for the flow path, wherein the opening 2 has an opening axis H along the geometry of the flow path . The opening 2 connects the first gas region L, which is located to the left of the valve 1 or the dividing wall (not shown) in the figure, with the second gas region R to the right. Such a partition wall is formed, for example, by the chamber wall of the vacuum chamber.

[0057] The closure part 4 can be moved linearly along a geometrical transposition axis V extending transversely to the opening axis H in the closing part plane 22 from the open position O, which releases the op...

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Abstract

The invention relates to a vacuum valve (1) having a valve closure (4) and a drive unit (7) coupled to the valve closure (4), the drive unit having at least one adjusting element (5). The vacuum valve (1) also has a position sensor (10, 10'), in particular a displacement or distance sensor, so that a reference can be made to the zero position of the vacuum valve (1), in particular the open position (O) or the closed position (G) The position of the valve closure (4) and / or of at least one of the adjusting elements (5) is measured.

Description

technical field [0001] The invention relates to a vacuum valve with at least one position sensor and a method for controlling a vacuum valve with position measurement. Background technique [0002] Generally, vacuum valves are known in various embodiments of the prior art for regulating the volume flow or mass flow and / or for closing a flow path in a substantially gas-tight manner through a valve housing formed in the valve housing. Openings, these vacuum valves are used in particular in vacuum chamber systems in the field of IC, semiconductor or substrate manufacturing, which must be carried out in a protected atmosphere as free as possible from impurity particles. Such a vacuum chamber system comprises in particular at least one evacuable vacuum chamber, which is provided for accommodating semiconductor components or substrates to be processed or produced and has at least one vacuum pump, and at least one vacuum pump for evacuating the vacuum chamber. A cavity opening thr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F16K51/02F16K37/00F16K3/18F16K3/10
CPCF16K37/0041F16K51/02F16K3/10F16K3/18F16K37/0083
Inventor 克里斯托夫·伯姆艾德里安·埃申莫瑟凯尔·阿克塞尔·埃尔福德
Owner VAT HLDG AG