Recharge tube and single crystal manufacturing method

Abstract

A recharge tube is equipped with a tubular member for storing a material and a conical valve for opening and closing an opening at a lower section of the tubular member. The recharge tube is characterized in that the tubular member has a lower conical opening at a lower end section of the inner circumferential surface and an upper conical opening above the lower conical opening at the lower end section, the lower conical opening being a conical opening having an inner diameter which continually decreases in the downward direction, the upper conical opening being a conical opening having an inner diameter which continually decreases in the downward direction, and that the valve is positioned between the lower conical opening and upper conical opening. Accordingly, provided is a low-cost recharge tube which can be easily placed in a single crystal manufacturing device and taken out from the single crystal manufacturing device, allows a solid material of a nugget shape, a granular shape or the like to be introduced directly to a melt bath surface in a crucible, and furthermore, causes splashes from the melt to adhere only to the recharge tube or a quartz crucible, thereby protecting the single crystal manufacturing device.

Description

technical field [0001] The invention relates to a method for manufacturing a refill tube and a single crystal. Background technique [0002] A silicon single crystal wafer used as a substrate of a semiconductor integrated circuit is manufactured, for example, by Czochralski (CZ) pulling of single crystal silicon. In the CZ method, first, a quartz crucible is filled with polycrystalline silicon (polycrystalline raw material) as a raw material, and a graphite crucible holding the quartz crucible is heated by a cylindrical graphite heater located on its outer periphery to melt the polycrystalline silicon. Next, when the seed crystal is immersed in the silicon melt to form a wire drawing part (Japanese: twisted part) and dislocation-free, the single crystal silicon is grown to a desired diameter and length. In this CZ method, in order to reduce the manufacturing cost of single crystal silicon, it is known that in order to supply the part of the silicon melt in the crucible that...

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Problems solved by technology

Therefore, there is a problem that the life of device parts

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