Micro-LED integrated full-color display chip based on polar surface and non-polar surface growth and its preparation method

Abstract

The invention discloses a micro-LED integrated full-color display chip based on polar and non-polar surface growth and a preparation method thereof. The device structure includes: a substrate, a patterned n-type gallium nitride layer, and multiple quantum wells Active layer, p-type gallium nitride layer, insulating layer, n-type electrode and p-type electrode, red light wavelength conversion material. The multi-quantum well active layer is simultaneously epitaxially extended on the polar surface and the non-polar surface of the patterned n-type gallium nitride layer to obtain green light and blue light micro-LED light-emitting units respectively. Each pixel unit contains a green micro-LED light-emitting unit and two blue micro-LED light-emitting units. By using a red wavelength conversion material to convert one of the blue light micro-LED light-emitting units into a red light micro-LED light-emitting unit, the same wafer The red, green and blue RGB module is obtained on the surface, the RGB pixel unit is integrated, and the structure is flip-chip combined to the integrated circuit control board to realize full-color display.

Description

technical field [0001] The invention belongs to the technical field of semiconductor optoelectronics, and in particular relates to a micro-LED integrated full-color display chip based on growth of polar and non-polar surfaces and a preparation method thereof. Background technique [0002] Micro-LED is about miniaturizing LED, reducing its size to less than 100 microns. Micro LED has the advantages of low power consumption, high brightness, high resolution, high color saturation, fast response, long life, high efficiency, etc., and shows good application prospects in many application fields, such as display technology , optical communication, optogenetics, etc., micro-LED is widely considered to be the next big trend in the field of display technology. For display applications, each micro-LED can be regarded as a pixel, which can be individually driven to light up. When the entire module becomes smaller, the number of pixels increases greatly, and its brightness, image quali...

AI Technical Summary

Problems solved by technology

[0003] At present, the application of micro-LEDs to full-color displays still has mass production problems. The main reason is that the micro-LEDs used for full-color displays are complicated to set up, and micro-LEDs of different colors need to be transferred multiple times to make them compatible with the circuit substrate. Bonding, mass transfer is difficult. In addition, the precision of bonding is high, resulting in low product yield and difficult mass production.

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