Vibration non-sensitive silicon micro-electromechanical gyroscope

Abstract

The vibration non-sensitive silicon micro-electromechanical gyroscope comprises a four-mass tuning fork microstructure, a control circuit, a packaging shell and a shock absorber assembly, the four-mass tuning fork microstructure is a two-degree-of-freedom motion microstructure machined based on the SOG technology, and the four mass blocks move in the X direction and the Y direction in the plane under the stress condition. The control circuit is composed of a C / V conversion circuit, a drive shaft self-excitation loop, a detection shaft force balance loop, an MCU control circuit and the like. The micro structure and the control circuit board are packaged together by the packaging shell, and an external mechanical interface is formed through four mounting holes of the shell; and the shock absorber assembly is a connecting mechanism between the circuit board and the packaging shell. The high-precision vibration non-sensitive silicon micro-electro-mechanical gyroscope is high in measurementprecision and resistant to vibration impact, can be widely applied to systems such as guided bombs, portable air defense missiles, intelligent shells, unmanned aerial vehicles and navigation equipment, and is used for measuring the rotation angle rate of a carrier around a fixed shaft relative to an inertial space.

Description

technical field [0001] The invention relates to a high-precision vibration non-sensitive silicon micro-electromechanical gyro based on a four-mass double-tuning fork micro-sensitive structure, which belongs to the field of micro-mechanical inertial instruments and can be applied to guided bombs, portable anti-aircraft missiles, intelligent shells, unmanned aerial vehicles, and navigation equipment. and other systems for measuring the angular rate of rotation of a carrier around a fixed axis relative to inertial space. Background technique [0002] Silicon micro-electromechanical gyroscope is a new type of micro-mechanical inertial instrument developed in the 1980s. It belongs to the category of micro-electro-mechanical systems. It is generally composed of micro- or nano-scale movable micro-structures and control circuits for sensitive micro-signals. The angular rate of rotation about a fixed axis relative to inertial space. It is manufactured using micro-electromechanical p...

AI Technical Summary

Problems solved by technology

[0004] The technical problem of the present invention is: through the method of combining the fully symmetrical and fully differential four-mass double-tuning fork micro-sensitive structure and the external shock absorber assembly, the high-precision capacitance signal detection and control technology is used to realize the complex vibration of the silicon micro-electromechanical gyroscope. High accuracy of angular rate measurement can be maintained under mechanical environment

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