A vibration-insensitive silicon MEMS gyroscope

Abstract

A vibration-insensitive silicon micro-electromechanical gyroscope, including a four-mass tuning fork microstructure, a control circuit, a packaging case and a shock absorber assembly; the four-mass tuning fork microstructure is a two-degree-of-freedom motion microstructure processed based on SOG technology, and four The mass block moves along the X and Y directions in the plane under the condition of force; the control circuit is composed of C / V conversion circuit, drive shaft self-excitation circuit, detection axial force balance circuit, MCU control circuit, etc.; the package shell combines the microstructure and The control circuit board is packaged together and forms an external mechanical interface through four mounting holes of the housing; the shock absorber assembly is the connection mechanism between the circuit board and the packaging housing. The invention is a high-precision vibration non-sensitive silicon micro-electromechanical gyroscope, which has high measurement accuracy and anti-vibration impact, and can be widely used in systems such as guided bombs, portable anti-aircraft missiles, intelligent shells, unmanned aerial vehicles, navigation equipment, etc., for measuring carriers The angular rate of rotation about a fixed axis relative to inertial space.

Description

technical field [0001] The invention relates to a high-precision vibration non-sensitive silicon micro-electromechanical gyro based on a four-mass double-tuning fork micro-sensitive structure, which belongs to the field of micro-mechanical inertial instruments and can be applied to guided bombs, portable anti-aircraft missiles, intelligent shells, unmanned aerial vehicles, and navigation equipment. and other systems for measuring the angular rate of rotation of a carrier around a fixed axis relative to inertial space. Background technique [0002] Silicon micro-electromechanical gyroscope is a new type of micro-mechanical inertial instrument developed in the 1980s. It belongs to the category of micro-electro-mechanical systems. It is generally composed of micro- or nano-scale movable micro-structures and control circuits for sensitive micro-signals. The angular rate of rotation about a fixed axis relative to inertial space. It is manufactured using micro-electromechanical p...

AI Technical Summary

Problems solved by technology

[0004] The technical problem of the present invention is: through the method of combining the fully symmetrical and fully differential four-mass double-tuning fork micro-sensitive structure and the external shock absorber assembly, the high-precision capacitance signal detection and control technology is used to realize the complex vibration of the silicon micro-electromechanical gyroscope. High accuracy of angular rate measurement can be maintained under mechanical environment

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