A High Precision Horizontal Axis Silicon Micro Gyroscope Based on Tuning Fork Driving Effect

Abstract

The invention discloses a high-precision horizontal-axis silicon micro-gyroscope based on the tuning fork driving effect, comprising: a cap layer, a gyroscope sensitive structure and a substrate layer; wherein, the cap layer and the substrate layer are connected to form an internal vacuum structure, and the gyroscope The sensitive structure is set in the internal vacuum structure; the gyro sensitive structure includes the first drive comb set, the second drive comb set, the third drive comb set, the fourth drive comb set, the first drive detection comb, the second drive comb Detection comb teeth, third drive detection comb teeth, fourth drive detection comb teeth, first drive elastic beam group, second drive elastic beam group, first detection elastic beam group, second detection elastic beam group, anchor area group, The first mass block, the second mass block, the coupling elastic beam, the first driving frame and the second driving frame. The invention realizes the measurement of pitch and roll angular rate, and reduces the volume of the inertial measurement unit.

Description

A High Precision Horizontal Axis Silicon Microgyroscope Based on Tuning Fork Drive Effect technical field The invention belongs to the technical field of micromechanical inertial instruments, in particular to a kind of high precision based on tuning fork drive effect Horizontal-axis silicon micro-gyroscope can be used in guided bombs, portable air defense missiles, mobile equipment, drones, navigation equipment, etc. It is used to measure the angular rate of rotation of the carrier relative to the inertial space around a fixed axis. Background technique A gyroscope is a sensor that measures the relative inertial space rotation motion of a carrier, and is a motion measurement, inertial navigation, guidance Core devices in the field of control, high-end industrial equipment such as aerospace, unmanned driving, guided munitions, and precision strike weapons It has very important application value. With individual soldier navigation, micro-combat platform, satellite nav...

AI Technical Summary

Problems solved by technology

This placement leads to an increase in the volume of the inertial measurement unit, which is not conducive to the miniaturization of the micro-inertial system

However, there is still a big gap between the accuracy and integration of domestic single-chip integrated three-axis gyroscopes compared with foreign advanced technologies, which greatly limits the development and application of domestic micro-inertial devices. The coupling degree of the direction is high, which is not conducive to high-precision measurement

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