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Assembly of liner and flange for vertical furnace as well as liner and vertical furnace

A vertical furnace and lining technology, which is applied in the direction of furnace components, vertical furnaces, furnaces, etc., and can solve the problem of pollution in the inner space of the treatment tube

Pending Publication Date: 2020-03-31
エーエスエムアイピーホールディングベーフェー
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] A problem with vertical processing furnaces for processing substrates can be contamination in the interior space of the processing tubes

Method used

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  • Assembly of liner and flange for vertical furnace as well as liner and vertical furnace
  • Assembly of liner and flange for vertical furnace as well as liner and vertical furnace
  • Assembly of liner and flange for vertical furnace as well as liner and vertical furnace

Examples

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Embodiment Construction

[0028] In the present application, similar or corresponding features are indicated by similar or corresponding reference signs. The description of various embodiments is not limited to the examples shown in the figures, and reference numerals used in the detailed description and claims are not intended to limit the described content to the examples shown in the figures.

[0029] figure 1 A cross-sectional view of a shaft furnace including a liner and flange assembly according to an embodiment is shown. The shaft furnace includes a low-pressure process tube 12 defining an interior and a heater H configured to heat the interior.

[0030] Extending in the interior is a liner 2 comprising a substantially cylindrical wall delimited by a liner opening at a lower end and a dome-shaped top closure 2d at a higher end. The liner is substantially closed to the gas above the opening of the liner and defines an inner space I.

[0031] A flange 3 may be provided to at least partially clo...

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Abstract

An assembly of a liner and a flange for a vertical furnace for processing substrates is provided. The liner being configured to extend in the interior of a process tube of the vertical furnace, and the flange is configured to at least partially close a liner opening. The liner comprising a substantially cylindrical wall delimited by the liner opening at a lower end and closed at a higher end and being substantially closed for gases above the liner opening and defining an inner space. The flange comprising: an inlet opening configured to insert and remove a boat configured to carry substrates in the inner space of the liner; a gas inlet to provide a gas to the inner space. The assembly is constructed and arranged with a gas exhaust opening to remove gas from the inner space and a space between the liner and the low pressure tube.

Description

technical field [0001] The present invention relates to low pressure shaft furnaces, and more particularly to liner and flange assemblies for low pressure shaft furnaces, and shaft furnaces used therein. The liner is configured to extend within the interior of the low pressure process tube of the shaft furnace, and the flange is configured to partially enclose the interior of the tube. Background technique [0002] A vertical processing furnace for processing substrates such as semiconductor wafers may include a heating device positioned around a bell-shaped processing tube, and a substantially cylindrical liner disposed coaxially within the processing tube. The upper end of the treatment tube may for example be closed by a dome-shaped structure, while the lower end surface of the treatment tube may be open. [0003] The liner may be open at its upper and lower ends. The lower end may be partially closed by a flange. The interior space defined by the liner and the flange ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67
CPCH01L21/67017H01L21/67109H01L21/67248F27B1/14F27B1/28F27B5/04F27B5/08F27B5/12F27B5/16F27B2005/162F27D3/0084F27D11/00F27B17/0025
Inventor L.杰迪拉C.德里德尔T.奥斯特拉肯K.P.伯昂斯特拉
Owner エーエスエムアイピーホールディングベーフェー