Wavefront detection device and method for edge sub-mirror in spliced mirror
A technology of wavefront detection and sub-mirror, which is applied in the direction of measuring devices, machine/structural component testing, optical instrument testing, etc.
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[0028] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0029] Such as figure 1 As shown, a wavefront detection device of the edge sub-mirror in the splicing mirror uses an interferometer and a laser tracker in combination, and uses a computational hologram to compensate for aberrations to detect the wavefront of the edge sub-mirror in the splicing mirror. The device includes a high-precision flat mirror 101, a lifting frame 102, a measured edge mirror 103, a tilt adjustment device 104, a calculation hologram 105, a small five-dimensional adjustment table 106, a standard lens 107, an interferometer 108, and a vibration isolation platform 109 , Five-dimensional adjustment table 110, laser tracker 111, target ball 112.
[0030] Wherein, the light emitted in the interferometer 108 passes through the standard lens 107, the calculation hologram 105, the measured edge sub-mirror 103, and is reflected on...
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