Mounting device for main support frame plate of lithography machine

Abstract

The invention discloses a mounting device for a main support frame plate of a lithography machine. The mounting device comprises a first sliding table mounting plate, a second sliding table mounting plate, and an inclination angle adjusting assembly. One end of the first sliding table mounting plate is hinged to one end of the second sliding table mounting plate. The inclination angle adjusting assembly is arranged between the first sliding table mounting plate and the second sliding table mounting plate and used for adjusting an included angle between the first sliding table mounting plate and the second sliding table mounting plate; the first sliding table mounting plate is provided with a first sliding table which is detachably and fixedly connected with a reference plate, and the firstsliding table can slide on the first sliding table mounting plate; and the second sliding table mounting plate is provided with a second sliding table which is detachably and fixedly connected with the frame plate, the second sliding table can slide on the second sliding table mounting plate, and the sliding direction of the first sliding table and the sliding direction of the second sliding table are perpendicular in space. The device is simple in structure, adjustment of three degrees of freedom can be realized, high-precision positioning and installation are carried out, and physical laborof operators is reduced during installation and adjustment.

Description

technical field [0001] The invention relates to the field of auxiliary installation equipment for photolithography machines, and more specifically, relates to an installation device for a frame plate of a main support frame of a photolithography machine. Background technique [0002] As the resolution of lithography machines is getting higher and higher, the optical-mechanical structure of lithography lenses is becoming more and more complex, and has gradually developed from the original two-mirror system to the six-mirror system. With the increase of the mirror group, the overall weight of the lithography machine lens increases. In order to reduce the weight of the lithography machine lens, the mounting plate of the main support frame of the lithography machine lens is mostly selected according to the layout of the optical machine structure and is inclined to the reference plate. The angle arrangement scheme compresses the unnecessary space in the lithography lens, and achi...

AI Technical Summary

Problems solved by technology

[0003] In view of this, the purpose of the present invention is to provide an installation device for the frame plate of the main support frame of the lithography machine, to solve the problem that the existing frame plate needs to be aligned with the reference plate during installation, and the alignment is difficult when installed by hoisting , low alignment accuracy and other issues

Images