Mounting device for main support frame plate of lithography machine
A technology for installing devices and frame plates, which is applied in the direction of hand-held tools and manufacturing tools, can solve the problems of low alignment accuracy and difficulty in alignment, and achieve the effect of reducing physical labor, simple device structure, and precise installation
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[0028] The embodiment of the present invention discloses an installation device for a frame plate of a main support frame of a lithography machine, so as to solve the problem that the existing frame plate needs to be aligned with the reference plate during installation, and the alignment is difficult and the alignment accuracy is difficult when installed by hoisting. lower issues.
[0029] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0030] see Figure 1-Figure 5 , figure 1 A schemat...
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