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A Silicon Waveguide Mode Coupler Covered with Su-8 Cladding Based on Refractive Index Tuning

A SU-8, mode-coupling technology, applied in the field of optical communication, can solve the problems of single-mode optical fiber docking, small mode spot size, etc., and achieve the effects of avoiding alignment problems, high efficiency of mode conversion, and high coupling efficiency

Active Publication Date: 2020-12-08
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this type of refractive index modulation device cannot be connected with a standard 1550nm band single-mode fiber because the coupled mode spot size is too small

Method used

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  • A Silicon Waveguide Mode Coupler Covered with Su-8 Cladding Based on Refractive Index Tuning
  • A Silicon Waveguide Mode Coupler Covered with Su-8 Cladding Based on Refractive Index Tuning
  • A Silicon Waveguide Mode Coupler Covered with Su-8 Cladding Based on Refractive Index Tuning

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Embodiment Construction

[0018] The present invention will be further described below in conjunction with drawings and embodiments.

[0019] Such as figure 1 As shown, the silicon waveguide mode coupler of the present invention includes a first-stage mode converter and a second-stage mode converter.

[0020] The first stage mode converter comprises a first waveguide array (I) covered with SU-8 cladding. The first strip waveguide (11), the second strip waveguide (12), and the third strip waveguide covering the SU-8 cladding in the single-mode fiber and the first waveguide array (I) covering the SU-8 cladding (13), the fourth strip waveguide (14) is docked in the air. The second-level mode converter includes a second waveguide array (II) covered with SU-8 cladding and a third waveguide array (III) covered with SU-8 cladding, and the second waveguide covered with SU-8 cladding The first S-shaped strip waveguide (21), the second S-shaped strip waveguide (22), the third S-shaped strip waveguide (23) and...

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Abstract

The invention provides a silicon waveguide mode coupler based on refractive index adjustment and control and covering an SU-8 cladding. The silicon waveguide mode coupler comprises a first-stage modeconverter and a second-stage mode converter, the first-stage mode converter comprises a first waveguide array (I) covering an SU-8 cladding. The single-mode optical fiber is in butt joint with the waveguide array in the first-stage mode converter in the air; and the second-stage mode converter comprises a waveguide array (II) covering the SU-8 cladding and a waveguide array (III) covering the SU-8cladding, and the waveguide array covering the SU-8 cladding is composed of four silicon nanowire waveguides covering SU-8 with the same thickness. The SU-8 cladding silicon waveguide array end facecoupler with the gradually-changed intervals has the advantages of being simple in process, high in coupling efficiency and capable of being matched with a standard single-mode optical fiber, and theactual requirements of the fields of optical communication, integrated optics and the like are met.

Description

technical field [0001] The invention belongs to the field of optical communication, and in particular relates to a silicon waveguide mode coupler covered with an SU-8 cladding layer based on refractive index regulation. Background technique [0002] With the rapid development of passive photonic devices in integrated optical chips and the need for testing and packaging, a stable light source access method is particularly important. Grating Coupling and Butt Coupling are two important methods of external light source, which provide a stable and reliable connection of the light source to the on-chip device. An out-of-plane light source can be efficiently coupled into the waveguide by using a grating coupler with large alignment tolerances. However, high-efficiency grating couplers usually have a complex manufacturing process and limited bandwidth. In addition, the vertical coupling method is not conducive to device packaging. An end face coupler is an in-plane coupler. Comp...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B6/14G02B6/12
CPCG02B6/12004G02B6/14G02B2006/12147G02B2006/12152
Inventor 时尧成刘卫喜张健豪
Owner ZHEJIANG UNIV