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Manufacturing method and system for anti-reflective micro-nano structure with inverted pyramidal truncated/square pyramidal shape

A technology of quadrangular truncated pyramid and micro-nano structure, which is applied in the direction of manufacturing tools, metal processing equipment, welding equipment, etc., can solve the problems of limited processing capacity and poor shape control ability, so as to improve shape control ability, increase reduction and increase The effect of transmittance

Active Publication Date: 2020-11-17
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0007] The purpose of the present invention is to solve the technical problems of poor shape control ability and limited processing ability of the femtosecond laser direct writing micro-nano processing method in the prior art, and to provide a manufacturing method of an inverted square pyramid / square pyramid shape anti-reflection micro-nano structure method and system

Method used

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  • Manufacturing method and system for anti-reflective micro-nano structure with inverted pyramidal truncated/square pyramidal shape
  • Manufacturing method and system for anti-reflective micro-nano structure with inverted pyramidal truncated/square pyramidal shape
  • Manufacturing method and system for anti-reflective micro-nano structure with inverted pyramidal truncated/square pyramidal shape

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Embodiment Construction

[0029] The shaping system of the present invention is composed of a femtosecond laser, optical path transmission, SLM rectangular flat-top shaping unit and a 100X tight focusing objective lens.

[0030] Taking the inverted square pyramid as an example, the specific process of its production method is as follows:

[0031] 1) The optical tight focus design is adopted to further compress the theoretical focal depth of optical shaping: a 100X focusing microscope objective lens is used, and the theoretical focal depth is ≤1μm; according to optical theory, the larger the magnification, the smaller the focal depth, and the smaller the focal depth, the The more conducive to layered manufacturing, and the higher the accuracy.

[0032] 2) According to the different material substrates (metal and non-metal materials) of the shape of the inverted pyramid truncated pyramid to be processed, and different laser process parameters (power, repetition frequency, single pulse energy), determine ...

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Abstract

The invention provides a manufacturing method and system of an inverted truncated rectangular pyramid / rectangular pyramid shaped anti-reflection micro-nano structure. The system comprises a femtosecond laser system, a light path transmission system, a rectangular flattop shaping unit and a high-rate focusing microobjective. The method comprises the steps of dividing an inverted truncated rectangular pyramid / rectangular pyramid into n layers according to the optimal manufacturing focus depth of the system, calculating the size of the layer surface of each layer, adjusting the system to enable the focal plane of the system to be located at h / 2 position of the first layer of the inverted truncated rectangular pyramid / rectangular pyramid and conducting processing on the layer through shaping gathered rectangular flattop light; and conducting processing in this way until processing of the nth layer is completed. Through the manufacturing method and system of the inverted truncated rectangular pyramid / rectangular pyramid shaped anti-reflection micro-nano structure, the problems of poor shape control capability and limited processing capability in the prior art are solved; processing is conducted in sequence according to the sizes of the layer surfaces to obtain the anti-reflection micro-nano structure with the micromicron-scale depth, and the anti-reflection rate of the anti-reflection micro-nano structure is improved; processing is conducted through light spot shaping according to the sizes of the layer surfaces, and the shape control capability of anti-reflection micro-nano processing is improved; and processing is conducted from top to bottom, and the processing depth-diameter ratio is larger.

Description

technical field [0001] The invention relates to a manufacturing method and a manufacturing system of an anti-reflective micro-nano structure, in particular to a manufacturing method and a manufacturing system of an anti-reflective micro-nano structure of a hundred-micron scale. Background technique [0002] After billions of years of evolution, animals and plants in nature have completed almost all functions of their own structures suitable for survival, and realized the optimization and unity of structure, materials and functions. With the development of science and technology, especially the progress of micro-level testing technology, the special properties displayed by some biological surface structures have aroused great interest, such as the super-hydrophobic properties of the lotus leaf surface, the structural color of butterfly wings, Moth-eye anti-reflection, etc. It is an eternal theme for the development of new biomimetic materials to study the micro-nano structur...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23K26/00B23K26/046B23K26/073
CPCB23K26/00B23K26/046B23K26/073
Inventor 李明李珣刘红军
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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