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Method of inspecting a sample with a charged particle beam device, and charged particle beam device

A technology of charged particle beam and sample, which is applied in the direction of material analysis, measurement device, circuit, etc. using wave/particle radiation, which can solve the problem of limited depth of field of charged particle beam device.

Active Publication Date: 2020-05-15
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] However, examining samples with non-planar surfaces with a charged particle beam can be challenging because not the entire sample surface can be located at the same distance from the objective, and the depth of field of charged particle beam devices is limited

Method used

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  • Method of inspecting a sample with a charged particle beam device, and charged particle beam device
  • Method of inspecting a sample with a charged particle beam device, and charged particle beam device
  • Method of inspecting a sample with a charged particle beam device, and charged particle beam device

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Embodiment Construction

[0022] Reference will now be made in detail to the example embodiments, one or more examples of which are illustrated in the drawings. Each example is provided by way of explanation and not meant to be limiting. For example, features illustrated or described as part of one embodiment can be used on or in combination with other embodiments to yield yet a further embodiment. The present disclosure is intended to cover such adaptations and variations.

[0023] In the following description of the drawings, the same reference numerals denote the same components. Only the differences with respect to individual implementations are described. The structures shown in the figures are not necessarily drawn in true scale, but rather to facilitate a better understanding of the embodiments.

[0024] figure 1 A charged particle beam device 100 configured to operate according to the methods described herein is shown. The charged particle beam device 100 may include a scanning electron mi...

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PUM

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Abstract

A method of inspecting a sample (10) with a charged particle beam device is described. The method comprises arranging the sample (10) on a stage (20), determining a first focusing strength of an objective lens (150) adapted to focus a charged particle beam (101) on a first surface region (11) of the sample that is arranged at a first distance (D1) from the objective lens (150) in a direction of anoptical axis (A), calculating a difference (13) between the first distance (D1) and a predetermined working distance (WD) based on the determined first focusing strength, adjusting a distance betweenthe first surface region (11) and the objective lens (150) by the calculated difference, and inspecting the first surface region (11). According to a further aspect, a charged particle beam device configured to be operated according to the above method is described.

Description

technical field [0001] The present disclosure relates to a method of examining a sample using a charged particle beam device. In particular, inspecting large area substrates for display manufacturing which may have non-planar surfaces. More particularly, embodiments described herein relate to methods and apparatus for inspecting samples using a focused charged particle beam, particularly for imaging, reviewing, inspecting for defects, and making critical dimension measurements of samples At least one of the . Furthermore, a charged particle beam device for examining a sample is described. Background technique [0002] In many applications, thin layers are deposited on substrates, such as glass substrates. The substrates are typically coated in a vacuum chamber of the coating equipment. For some applications, the substrate is coated in a vacuum chamber using vapor deposition techniques. The price of electronic devices, especially optoelectronic devices, has decreased sig...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/21H01J37/28
CPCH01J2237/04922H01J2237/216H01J2237/2811H01J2237/2814H01J2237/2817H01J37/21H01J37/28G01N23/2251G01N2223/418
Inventor 伯纳德·G·穆勒库普雷特·辛格·维迪伯恩哈德·舒勒罗伯特·特劳纳路德威格·里德尔
Owner APPLIED MATERIALS INC